控制准静态 MEMS 镜,用于光栅扫描投影应用

IF 6.7 3区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC International Journal of Optomechatronics Pub Date : 2024-08-16 DOI:10.1080/15599612.2024.2386991
Riccardo Antonello, Roberto Oboe, Daniele D’Elia, Luca Molinari
{"title":"控制准静态 MEMS 镜,用于光栅扫描投影应用","authors":"Riccardo Antonello, Roberto Oboe, Daniele D’Elia, Luca Molinari","doi":"10.1080/15599612.2024.2386991","DOIUrl":null,"url":null,"abstract":"The angular motion of quasi-static micromirrors used for raster scanning projection applications is typically affected by undesired oscillations related to high-frequency resonant modes triggered b...","PeriodicalId":50296,"journal":{"name":"International Journal of Optomechatronics","volume":"172 1","pages":""},"PeriodicalIF":6.7000,"publicationDate":"2024-08-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Control of a quasi-static MEMS Mirror for raster scanning projection applications\",\"authors\":\"Riccardo Antonello, Roberto Oboe, Daniele D’Elia, Luca Molinari\",\"doi\":\"10.1080/15599612.2024.2386991\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The angular motion of quasi-static micromirrors used for raster scanning projection applications is typically affected by undesired oscillations related to high-frequency resonant modes triggered b...\",\"PeriodicalId\":50296,\"journal\":{\"name\":\"International Journal of Optomechatronics\",\"volume\":\"172 1\",\"pages\":\"\"},\"PeriodicalIF\":6.7000,\"publicationDate\":\"2024-08-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Optomechatronics\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1080/15599612.2024.2386991\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Optomechatronics","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1080/15599612.2024.2386991","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0

摘要

用于光栅扫描投影应用的准静态微镜的角运动通常会受到与高频共振模式触发的不期望振荡的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Control of a quasi-static MEMS Mirror for raster scanning projection applications
The angular motion of quasi-static micromirrors used for raster scanning projection applications is typically affected by undesired oscillations related to high-frequency resonant modes triggered b...
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
International Journal of Optomechatronics
International Journal of Optomechatronics 工程技术-工程:电子与电气
CiteScore
9.30
自引率
0.00%
发文量
3
审稿时长
3 months
期刊介绍: International Journal of Optomechatronics publishes the latest results of multidisciplinary research at the crossroads between optics, mechanics, fluidics and electronics. Topics you can submit include, but are not limited to: -Adaptive optics- Optomechanics- Machine vision, tracking and control- Image-based micro-/nano- manipulation- Control engineering for optomechatronics- Optical metrology- Optical sensors and light-based actuators- Optomechatronics for astronomy and space applications- Optical-based inspection and fault diagnosis- Micro-/nano- optomechanical systems (MOEMS)- Optofluidics- Optical assembly and packaging- Optical and vision-based manufacturing, processes, monitoring, and control- Optomechatronics systems in bio- and medical technologies (such as optical coherence tomography (OCT) systems or endoscopes and optical based medical instruments)
期刊最新文献
Laboratory demonstration of single-camera PPPP wavefront sensing using neural networks Control of a quasi-static MEMS Mirror for raster scanning projection applications Resonator-based near perfect metamaterial absorber with high EMI shielding for Wi-Fi and 5G applications Optofluidic sorting of microparticles using Airy beams Review of sensing and actuation technologies – from optical MEMS and nanophotonics to photonic nanosystems
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1