Design and fabrication of polarization independent LCoS phase modulators with polymer waveplate and analog driving

Phase-only liquid crystal on silicon (LCoS) spatial light modulators are used in a variety of applications. Despite their wide use, current phase-only LCoS devices are hindered by their single-polarization modulation. We propose a polarization independent LCoS device which uses a polymer quarter-wave plate for polarization conversion. We designed a custom pixel circuit which enables high driving voltage and high pixel grayscale by utilizing an analog driving frame buffer pixel circuit. Our pixel circuit is optimized for small pixel size and the silicon backplanes can be fabricated at a traditional foundry. We demonstrate polarization independent phase modulation through optical beam steering tests for various input polarizations. Our fabricated device lays the foundation for commercial LCoS devices highly suitable for wavelength selective switches, holographic display, wavefront correction, and optical beam shaping.