Methods of fabrication and modeling of CMUTs – A review

Widespread use of capacitive micromachined ultrasound transducers (CMUTs) has motivated the development of a variety of methods for their fabrication and modeling. The choice of methodology strongly depends on the application of the transducer being developed, e.g., for medical ultrasound, bioseinsing, distance/level estimation, non-destructive testing, etc. At the same time, CMUTs may have diverse shape and can be implemented in the form of single elements, 2D- or even 3D-arrays. Researchers and developers face a problem of choosing the most suitable approach to obtain the best results. The present study reports a summary analysis of the most used techniques for fabrication and modeling in the field of CMUTs.