{"title":"应用透射电子显微镜研究功能纳米元素","authors":"K. E. Prikhodko, M. M. Dement’eva","doi":"10.1134/S1063784224070363","DOIUrl":null,"url":null,"abstract":"<p>Using the focused ion beam probe method, cross-section sample of a single functional device of micron dimensions were cut out for STEM and TEM studies. The use of analytical methods of transmission electron microscopy made it possible to obtain accurate data on the geometric parameters of nanoscale functional devices, the phase and elemental composition of functional element material, as well as on the concentration of free electrons at the Fermi level in the nanoelement material.</p>","PeriodicalId":783,"journal":{"name":"Technical Physics","volume":"69 7","pages":"2093 - 2097"},"PeriodicalIF":1.1000,"publicationDate":"2024-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Application of Transmission Electron Microscopy for the Study of a Functional Nanoelement\",\"authors\":\"K. E. Prikhodko, M. M. Dement’eva\",\"doi\":\"10.1134/S1063784224070363\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>Using the focused ion beam probe method, cross-section sample of a single functional device of micron dimensions were cut out for STEM and TEM studies. The use of analytical methods of transmission electron microscopy made it possible to obtain accurate data on the geometric parameters of nanoscale functional devices, the phase and elemental composition of functional element material, as well as on the concentration of free electrons at the Fermi level in the nanoelement material.</p>\",\"PeriodicalId\":783,\"journal\":{\"name\":\"Technical Physics\",\"volume\":\"69 7\",\"pages\":\"2093 - 2097\"},\"PeriodicalIF\":1.1000,\"publicationDate\":\"2024-09-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Technical Physics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://link.springer.com/article/10.1134/S1063784224070363\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Technical Physics","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1134/S1063784224070363","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
引用次数: 0
摘要
利用聚焦离子束探针方法，切割出微米尺寸的单个功能器件的横截面样品，用于 STEM 和 TEM 研究。利用透射电子显微镜的分析方法，可以获得有关纳米级功能器件的几何参数、功能元素材料的相和元素组成以及纳米元素材料中费米级自由电子浓度的精确数据。
Application of Transmission Electron Microscopy for the Study of a Functional Nanoelement
Using the focused ion beam probe method, cross-section sample of a single functional device of micron dimensions were cut out for STEM and TEM studies. The use of analytical methods of transmission electron microscopy made it possible to obtain accurate data on the geometric parameters of nanoscale functional devices, the phase and elemental composition of functional element material, as well as on the concentration of free electrons at the Fermi level in the nanoelement material.
期刊介绍：
Technical Physics is a journal that contains practical information on all aspects of applied physics, especially instrumentation and measurement techniques. Particular emphasis is put on plasma physics and related fields such as studies of charged particles in electromagnetic fields, synchrotron radiation, electron and ion beams, gas lasers and discharges. Other journal topics are the properties of condensed matter, including semiconductors, superconductors, gases, liquids, and different materials.
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