{"title":"计算轻离子溅射碳化钛表面层的成分组成","authors":"V. V. Manukhin","doi":"10.1134/S1063784224070296","DOIUrl":null,"url":null,"abstract":"<p>On the basis of the previously tested model of sputtering binary layered inhomogeneous targets with light ions, a method for calculating the component composition of the surface layers of titanium carbide under stationary (stoichiometric) sputtering with light ions is proposed. The results of calculations of the component composition of the altered surface layer of titanium carbide are given in comparison with experimental data and the results of computer simulation. The proposed method for calculating the component composition based on the model of sputtering binary layered inhomogeneous targets made it possible to estimate the thickness of the changed surface layer. The proposed calculation method allows developing a technology for creating titanium carbide surfaces with a given ratio of components.</p>","PeriodicalId":783,"journal":{"name":"Technical Physics","volume":"69 7","pages":"2049 - 2052"},"PeriodicalIF":1.1000,"publicationDate":"2024-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Calculation of the Component Composition of the Surface Layers of Titanium Carbide Sputtered with Light Ions\",\"authors\":\"V. V. Manukhin\",\"doi\":\"10.1134/S1063784224070296\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>On the basis of the previously tested model of sputtering binary layered inhomogeneous targets with light ions, a method for calculating the component composition of the surface layers of titanium carbide under stationary (stoichiometric) sputtering with light ions is proposed. The results of calculations of the component composition of the altered surface layer of titanium carbide are given in comparison with experimental data and the results of computer simulation. The proposed method for calculating the component composition based on the model of sputtering binary layered inhomogeneous targets made it possible to estimate the thickness of the changed surface layer. The proposed calculation method allows developing a technology for creating titanium carbide surfaces with a given ratio of components.</p>\",\"PeriodicalId\":783,\"journal\":{\"name\":\"Technical Physics\",\"volume\":\"69 7\",\"pages\":\"2049 - 2052\"},\"PeriodicalIF\":1.1000,\"publicationDate\":\"2024-09-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Technical Physics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://link.springer.com/article/10.1134/S1063784224070296\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Technical Physics","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1134/S1063784224070296","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
Calculation of the Component Composition of the Surface Layers of Titanium Carbide Sputtered with Light Ions
On the basis of the previously tested model of sputtering binary layered inhomogeneous targets with light ions, a method for calculating the component composition of the surface layers of titanium carbide under stationary (stoichiometric) sputtering with light ions is proposed. The results of calculations of the component composition of the altered surface layer of titanium carbide are given in comparison with experimental data and the results of computer simulation. The proposed method for calculating the component composition based on the model of sputtering binary layered inhomogeneous targets made it possible to estimate the thickness of the changed surface layer. The proposed calculation method allows developing a technology for creating titanium carbide surfaces with a given ratio of components.
期刊介绍：
Technical Physics is a journal that contains practical information on all aspects of applied physics, especially instrumentation and measurement techniques. Particular emphasis is put on plasma physics and related fields such as studies of charged particles in electromagnetic fields, synchrotron radiation, electron and ion beams, gas lasers and discharges. Other journal topics are the properties of condensed matter, including semiconductors, superconductors, gases, liquids, and different materials.
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