{"title":"考虑构型、挠性元件和致动器的压电致动顺变机构综合设计方法","authors":"","doi":"10.1016/j.mechmachtheory.2024.105808","DOIUrl":null,"url":null,"abstract":"<div><div>With the wide application of piezo-actuated compliant mechanisms (PACM) in the nano-positioning domain, it has been a crucial and challenging issue to design optimal PACMs with various design objectives and constraints. In this paper, an integrated design method for the planar PACMs is developed to realize their comprehensive performance optimization, considering the key factors, including mechanical configurations, flexure elements, and piezoelectric actuators (PEA). This method can effectively consider the complicated coupled dynamics between compliant mechanisms and actuators and further accurately predict the actual performance of the PACMs. Utilizing the Pareto optimality idea, the method can efficiently find the performance limits of various alternative configurations and offer the most appropriate design solutions for practical engineering applications. Two nano-positioning stages used for atomic force microscope (AFM) imaging are designed from alternative combinations of four configurations, five types of actuators, and twelve types of flexure hinges to illustrate the detailed design procedures. The results of the finite element analysis (FEA) and experiments finally verify the performance of the designed stages and validate the effectiveness of the proposed design method.</div></div>","PeriodicalId":49845,"journal":{"name":"Mechanism and Machine Theory","volume":null,"pages":null},"PeriodicalIF":4.5000,"publicationDate":"2024-10-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"An integrated design method for piezo-actuated compliant mechanisms considering configurations, flexure elements, and actuators\",\"authors\":\"\",\"doi\":\"10.1016/j.mechmachtheory.2024.105808\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>With the wide application of piezo-actuated compliant mechanisms (PACM) in the nano-positioning domain, it has been a crucial and challenging issue to design optimal PACMs with various design objectives and constraints. In this paper, an integrated design method for the planar PACMs is developed to realize their comprehensive performance optimization, considering the key factors, including mechanical configurations, flexure elements, and piezoelectric actuators (PEA). This method can effectively consider the complicated coupled dynamics between compliant mechanisms and actuators and further accurately predict the actual performance of the PACMs. Utilizing the Pareto optimality idea, the method can efficiently find the performance limits of various alternative configurations and offer the most appropriate design solutions for practical engineering applications. Two nano-positioning stages used for atomic force microscope (AFM) imaging are designed from alternative combinations of four configurations, five types of actuators, and twelve types of flexure hinges to illustrate the detailed design procedures. The results of the finite element analysis (FEA) and experiments finally verify the performance of the designed stages and validate the effectiveness of the proposed design method.</div></div>\",\"PeriodicalId\":49845,\"journal\":{\"name\":\"Mechanism and Machine Theory\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":4.5000,\"publicationDate\":\"2024-10-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Mechanism and Machine Theory\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0094114X24002350\",\"RegionNum\":1,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, MECHANICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Mechanism and Machine Theory","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0094114X24002350","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, MECHANICAL","Score":null,"Total":0}
An integrated design method for piezo-actuated compliant mechanisms considering configurations, flexure elements, and actuators
With the wide application of piezo-actuated compliant mechanisms (PACM) in the nano-positioning domain, it has been a crucial and challenging issue to design optimal PACMs with various design objectives and constraints. In this paper, an integrated design method for the planar PACMs is developed to realize their comprehensive performance optimization, considering the key factors, including mechanical configurations, flexure elements, and piezoelectric actuators (PEA). This method can effectively consider the complicated coupled dynamics between compliant mechanisms and actuators and further accurately predict the actual performance of the PACMs. Utilizing the Pareto optimality idea, the method can efficiently find the performance limits of various alternative configurations and offer the most appropriate design solutions for practical engineering applications. Two nano-positioning stages used for atomic force microscope (AFM) imaging are designed from alternative combinations of four configurations, five types of actuators, and twelve types of flexure hinges to illustrate the detailed design procedures. The results of the finite element analysis (FEA) and experiments finally verify the performance of the designed stages and validate the effectiveness of the proposed design method.
期刊介绍:
Mechanism and Machine Theory provides a medium of communication between engineers and scientists engaged in research and development within the fields of knowledge embraced by IFToMM, the International Federation for the Promotion of Mechanism and Machine Science, therefore affiliated with IFToMM as its official research journal.
The main topics are:
Design Theory and Methodology;
Haptics and Human-Machine-Interfaces;
Robotics, Mechatronics and Micro-Machines;
Mechanisms, Mechanical Transmissions and Machines;
Kinematics, Dynamics, and Control of Mechanical Systems;
Applications to Bioengineering and Molecular Chemistry