Self-Assembly Hybrid Manufacture of Nanoarrays for Metasurfaces.

The development of metasurfaces necessitates the rapid fabrication of nanoarrays on diverse substrates at large scales, the preparation of patterned nanoarrays on both planar and curved surfaces, and even the creation of nanoarrays on prefabricated structures to form multiscale metastructures. However, conventional fabrication methods fall short of these rigorous requirements. In this work, a novel self-assembly hybrid manufacturing (SAHM) method is introduced for the rapid and scalable fabrication of shape-controllable nanoarrays on various rigid and flexible substrates. This method can be easily integrated with other fabrication techniques, such as lithography and screen printing, to produce patterned nanoarrays on both planar and non-developable surfaces. Utilizing the SAHM method, nanoarrays are fabricated on prefabricated micropillars to create multiscale pillar-nanoarray metastructures. Measurements indicate that these multiscale metastructures can manipulate electromagnetic waves across a range of wavelengths. Therefore, the SAHM method demonstrates the potential of multiscale structures as a new paradigm for the design and fabrication of metasurfaces.