{"title":"掺钕 BaSnO3 薄膜在 c 平面蓝宝石衬底上的脉冲激光沉积，用于制造透明传感器","authors":"Gitanjali Mishra, Ashutosh Tiwari","doi":"10.1016/j.mseb.2024.117768","DOIUrl":null,"url":null,"abstract":"<div><div>This paper discusses the growth and characterization of Nd-doped BaSnO<sub>3</sub> (NDBSO) thin films on sapphire (0001) substrates using the Pulsed Laser Deposition (PLD) technique. NDBSO is a promising material for transparent sensors and electronics due to its wide bandgap. The study demonstrates a well-aligned heteroepitaxial growth of NDBSO on sapphire (0001) with a lattice parameter of 0.4226 nm. The results revealed high reliability and minimal aging effects under various environmental conditions. The utilization of PLD offered precise control over film thickness, enabling the fabrication of high-quality ultra-thin films approximately 500 nm in thickness through the ablation process involving 10,000 laser pulses. Key performance indicators (KPIs) include high transparency (>90 % for wavelengths above 500 nm), reproducibility, and structural stability.</div></div>","PeriodicalId":18233,"journal":{"name":"Materials Science and Engineering B-advanced Functional Solid-state Materials","volume":"310 ","pages":"Article 117768"},"PeriodicalIF":3.9000,"publicationDate":"2024-10-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Pulsed laser deposition of Nd-doped BaSnO3 thin films on c-plane sapphire substrate for transparent sensors\",\"authors\":\"Gitanjali Mishra, Ashutosh Tiwari\",\"doi\":\"10.1016/j.mseb.2024.117768\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>This paper discusses the growth and characterization of Nd-doped BaSnO<sub>3</sub> (NDBSO) thin films on sapphire (0001) substrates using the Pulsed Laser Deposition (PLD) technique. NDBSO is a promising material for transparent sensors and electronics due to its wide bandgap. The study demonstrates a well-aligned heteroepitaxial growth of NDBSO on sapphire (0001) with a lattice parameter of 0.4226 nm. The results revealed high reliability and minimal aging effects under various environmental conditions. The utilization of PLD offered precise control over film thickness, enabling the fabrication of high-quality ultra-thin films approximately 500 nm in thickness through the ablation process involving 10,000 laser pulses. Key performance indicators (KPIs) include high transparency (>90 % for wavelengths above 500 nm), reproducibility, and structural stability.</div></div>\",\"PeriodicalId\":18233,\"journal\":{\"name\":\"Materials Science and Engineering B-advanced Functional Solid-state Materials\",\"volume\":\"310 \",\"pages\":\"Article 117768\"},\"PeriodicalIF\":3.9000,\"publicationDate\":\"2024-10-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials Science and Engineering B-advanced Functional Solid-state Materials\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S092151072400597X\",\"RegionNum\":3,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Science and Engineering B-advanced Functional Solid-state Materials","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S092151072400597X","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Pulsed laser deposition of Nd-doped BaSnO3 thin films on c-plane sapphire substrate for transparent sensors
This paper discusses the growth and characterization of Nd-doped BaSnO3 (NDBSO) thin films on sapphire (0001) substrates using the Pulsed Laser Deposition (PLD) technique. NDBSO is a promising material for transparent sensors and electronics due to its wide bandgap. The study demonstrates a well-aligned heteroepitaxial growth of NDBSO on sapphire (0001) with a lattice parameter of 0.4226 nm. The results revealed high reliability and minimal aging effects under various environmental conditions. The utilization of PLD offered precise control over film thickness, enabling the fabrication of high-quality ultra-thin films approximately 500 nm in thickness through the ablation process involving 10,000 laser pulses. Key performance indicators (KPIs) include high transparency (>90 % for wavelengths above 500 nm), reproducibility, and structural stability.
期刊介绍：
The journal provides an international medium for the publication of theoretical and experimental studies and reviews related to the electronic, electrochemical, ionic, magnetic, optical, and biosensing properties of solid state materials in bulk, thin film and particulate forms. Papers dealing with synthesis, processing, characterization, structure, physical properties and computational aspects of nano-crystalline, crystalline, amorphous and glassy forms of ceramics, semiconductors, layered insertion compounds, low-dimensional compounds and systems, fast-ion conductors, polymers and dielectrics are viewed as suitable for publication. Articles focused on nano-structured aspects of these advanced solid-state materials will also be considered suitable.
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