Merging bound states in the continuum-driven ultrahigh sensing figure of merit in all-dielectric metasurfaces.

Radiation-free photonic bound states in the continuum (BIC) in metasurfaces allow ultrahigh quality (Q) factor and strongly confined mode volume, which are extremely advantageous in the development of ultrasensitive microcavity sensors. However, the conventional isolated BICs are susceptible to failure due to symmetry breaking caused by fabrication imperfection and nonzero incident angle. Here, we propose a silicon nitride-based metasurface with multiple BIC merging. The merging of accidental BIC and symmetry-protected BIC can increase the Q-factor near the Brillouin zone Γ point and thus robustly induces a figure of merit (FOM) of refractive index sensing at small incident angles two orders of magnitude higher than that in isolated BIC configuration. Specifically, the FOM in merging BIC reaches 10⁸ at a 2° incident angle. The BIC merging can be universally achieved in square lattices with C₄ symmetry, and slower decay of Q-factor and higher FOM can further occur in hexagonal lattices benefiting from higher-order topological charges. The advantage of merging BIC is also maintained when considering in-plane and out-of-plane symmetry breaking. These results offer a unique design path for high-performance metasurface sensors and can be extended to other high-Q applications such as low-threshold lasers, nonlinear frequency conversion, and low-loss waveguides.