Shasvat Rathod, Monika Snowdon, Matthew Peres Tino and Peng Peng
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These sensors integrate laser-induced graphene (LiG) with mixed metal oxides on a flexible polyimide film. fLDW simplifies the synthesis of graphene, functionalization of carbon structures into graphene oxides and reduced graphene oxides, and deposition of metal-oxide nanoparticles within a single experimental laser writing setup. The preparation and surface modification of dense oxygenated graphene networks and semiconducting metal oxide nanoparticles (CuO<small><sub><em>x</em></sub></small>, ZnO<small><sub><em>x</em></sub></small>, FeO<small><sub><em>x</em></sub></small>) enables rapid fabrication of LiG/MO<small><sub><em>x</em></sub></small> composite sensors with the ability to detect and differentiate various stimuli, including visible light, UV light, temperature, humidity, and magnetic fluxes. Further, this <em>in situ</em> customizability of fLDW-produced sensors allows for tunable sensitivity, response time, recovery time, and selectivity. The normalized current gain of resistive LiG/MO<small><sub><em>x</em></sub></small> sensors can be controlled between −2.7 to 3.5, with response times ranging from 0.02 to 15 s, and recovery times from 0.04 to 6 s. Furthermore, the programmable properties showed great endurance after 200 days in air and extended bend cycles. 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引用次数: 0
摘要
柔性可穿戴设备在医疗保健监测、软机器人、人机界面和人工智能等领域有着广泛的应用,因此在智能便携式电子产品领域发挥着举足轻重的作用。然而,在资源有限的环境中,将智能可穿戴传感器广泛集成到大规模生产中面临着挑战,需要低成本制造、高可靠性、稳定性和多功能性。在本研究中,我们展示了一种具有成本效益的光纤激光直写方法(fLDW),用于制造反应灵敏、坚固耐用的柔性传感器。这些传感器在柔性聚酰亚胺薄膜上集成了激光诱导石墨烯(LiG)和混合金属氧化物。fLDW 简化了石墨烯的合成、将碳结构功能化为石墨烯氧化物和还原石墨烯氧化物以及在单一激光写入实验装置中沉积金属氧化物纳米颗粒的过程。高密度含氧石墨烯网络和半导体金属氧化物纳米颗粒(CuO x、ZnO x、FeO x)的制备和表面改性使 LiG/MO x 复合传感器得以快速制造,并能检测和区分各种刺激,包括可见光、紫外线、温度、湿度和磁通量。此外,fLDW 生产的传感器的这种原位定制性允许对灵敏度、响应时间、恢复时间和选择性进行调整。电阻式 LiG/MO x 传感器的归一化电流增益可控制在 -2.7 到 3.5 之间,响应时间为 0.02 到 15 秒,恢复时间为 0.04 到 6 秒。总之,这些 LiG/MO x 传感器证明了 fLDW 在经济地大规模生产柔性可穿戴电子设备以满足物联网明确需求方面的有效性。
Laser writing of metal-oxide doped graphene films for tunable sensor applications†
Flexible and wearable devices play a pivotal role in the realm of smart portable electronics due to their diverse applications in healthcare monitoring, soft robotics, human–machine interfaces, and artificial intelligence. Nonetheless, the extensive integration of intelligent wearable sensors into mass production faces challenges within a resource-limited environment, necessitating low-cost manufacturing, high reliability, stability, and multi-functionality. In this study, a cost-effective fiber laser direct writing method (fLDW) was illustrated to create highly responsive and robust flexible sensors. These sensors integrate laser-induced graphene (LiG) with mixed metal oxides on a flexible polyimide film. fLDW simplifies the synthesis of graphene, functionalization of carbon structures into graphene oxides and reduced graphene oxides, and deposition of metal-oxide nanoparticles within a single experimental laser writing setup. The preparation and surface modification of dense oxygenated graphene networks and semiconducting metal oxide nanoparticles (CuOx, ZnOx, FeOx) enables rapid fabrication of LiG/MOx composite sensors with the ability to detect and differentiate various stimuli, including visible light, UV light, temperature, humidity, and magnetic fluxes. Further, this in situ customizability of fLDW-produced sensors allows for tunable sensitivity, response time, recovery time, and selectivity. The normalized current gain of resistive LiG/MOx sensors can be controlled between −2.7 to 3.5, with response times ranging from 0.02 to 15 s, and recovery times from 0.04 to 6 s. Furthermore, the programmable properties showed great endurance after 200 days in air and extended bend cycles. Collectively, these LiG/MOx sensors stand as a testament to the effectiveness of fLDW in economically mass-producing flexible and wearable electronic devices to meet the explicit demands of the Internet of Things.