适当厚度的粘接层有利于AlN晶体热应力的释放

IF 2.6 3区 化学 Q2 CHEMISTRY, MULTIDISCIPLINARY CrystEngComm Pub Date : 2024-11-26 DOI:10.1039/D4CE01000K
Wenhao Cao, Shouzhi Wang, Ruixian Yu, Guodong Wang, Yajun Zhu, Yuzhu Wu, Lingshuang Lv, Jingliang Liu, Xiangang Xu and Lei Zhang
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引用次数: 0

摘要

氮化铝晶体因其优异的光电性能而受到广泛关注。然而,巨大的生长难度限制了它们的大规模应用;因此,主要的挑战是如何减少氮化铝种子和钨支架之间的热应力。大量的热应力会导致位错密度的增加和裂纹的产生,严重影响AlN晶体的质量。因此,本文采用理论与实验相结合的方法研究了粘接层厚度与热应力的关系。粘接层厚度在0.1 ~ 0.8 mm范围内与种子处的热应力成反比,在0.8 ~ 1 mm范围内与种子处的热应力成正比。螺纹边缘位错(TEDs)和螺纹螺旋位错(TSDs)的分布与热应力分布密切相关。结果表明,当粘接层厚度为0.8 mm时,可以最有效地将AlN种子的热应力释放到106 Pa以下,降低晶体开裂的概率。本工作为AlN晶体的质量优化和膨胀生长提供了新的方向。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Suitable thickness of the adhesive layer facilitates the release of thermal stress in AlN crystals†

AlN crystals have attracted wide attention because of their excellent optoelectronic properties. However, the huge growth difficulty limits their large-scale application; thus, the main challenge is how to reduce the thermal stress between the AlN seeds and the tungsten holder. The massive thermal stress will lead to the increase of dislocation density and cracks, which seriously affect the quality of AlN crystals. Therefore, this work investigates the relationship between the thickness of the adhesive layer and the thermal stress by combining theory and experiment. The thickness of the adhesive layer was inversely proportional to the thermal stress at the seed in the range of 0.1–0.8 mm, while positively proportional in the range of 0.8–1 mm. The distribution of the threading edge dislocations (TEDs) and threading spiral dislocations (TSDs) is closely correlated with the thermal stress distribution. As a result, when the thickness of the adhesive layer is 0.8 mm, it can release the thermal stress of AlN seeds most effectively to below 106 Pa and reduce the probability of crystal cracking. This work provides a new direction for the quality optimization of AlN crystals and the expansion growth.

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来源期刊
CrystEngComm
CrystEngComm 化学-化学综合
CiteScore
5.50
自引率
9.70%
发文量
747
审稿时长
1.7 months
期刊介绍: Design and understanding of solid-state and crystalline materials
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