利用太赫兹成像技术可视化硅片中的光导效应

IF 0.3 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC IEICE Communications Express Pub Date : 2024-11-12 DOI:10.23919/comex.2024XBL0141

Shiho Konokawa;Kazuaki Ishioka;Akinori Taira

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引用次数: 0

摘要

在本文中，我们报告了利用太赫兹波对硅片进行反射成像的结果，旨在实现高分辨率和高透明度的传感技术。我们将硅晶片透过率的理论计算与成像实验结果进行了比较。通过这项研究，我们能够使用太赫兹反射成像来确认硅晶圆的频率特性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Visualization of the Photoconductive Effect in Silicon Wafers Using Terahertz Imaging

In this paper, we report the results of reflection imaging of silicon wafers using terahertz waves, aiming to achieve both high resolution and transparency in sensing technology. We compare the theoretical calculations of the transmittance of silicon wafers with the experimental results obtained through imaging. Through this study, we were able to confirm the frequency characteristics of silicon wafers using terahertz reflection imaging.

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来源期刊

IEICE Communications Express ENGINEERING, ELECTRICAL & ELECTRONIC-

自引率

33.30%

发文量

114