射频溅射法制备纳米铜掺杂氧化锡薄膜的结构、形态及光致发光性能研究

IF 1.5 4区 物理与天体物理 Q2 PHYSICS, MULTIDISCIPLINARY Brazilian Journal of Physics Pub Date : 2025-01-07 DOI:10.1007/s13538-024-01690-w
Shima Khosravani, Fatemeh Hajakbari, Alireza Hojabri
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引用次数: 0

摘要

本研究利用射频溅射技术研究了在玻璃和FTO衬底上沉积SnO2和cu掺杂SnO2薄膜的结构、形态和光学性质。随后将cu掺杂样品在400和500℃的氧流中退火。x射线衍射(XRD)分析表明,纯SnO2薄膜在两种衬底上均呈现非晶结构。相比之下,在玻璃衬底上掺杂cu的SnO2样品保持了非晶态,而在FTO衬底上的样品则转变为方形金红石结构。热退火进一步诱导了两个衬底上样品向四方金红石结构的转变。能谱分析(EDS)证实了SnO2薄膜中存在Cu。估计的晶体尺寸范围为16至20 nm的玻璃衬底和20至31 nm的FTO衬底。场发射扫描电镜(FESEM)和原子力显微镜(AFM)分析表明,表面形貌均匀,纹理光滑,与衬底的附着力强。未退火样品的带隙能(Eg)值分别为3.52、3.40、3.50和3.29 eV。值得注意的是,Cu掺杂和在FTO衬底上沉积SnO2薄膜导致带隙减小。这些发现为Cu掺杂、退火和衬底类型对SnO2结构和光学性质的影响提供了有价值的见解,为先进的光电应用铺平了道路。
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Investigation of Structural, Morphological, and Photoluminescence Properties of Nanocrystalline Copper doped Tin Oxide Thin Films Grown by RF Sputtering Method

This research investigates the structural, morphological, and optical properties of SnO2 and Cu-doped SnO2 films deposited on glass and FTO substrates using the RF sputtering technique. The Cu-doped samples were subsequently annealed in an oxygen flow at temperatures of 400 and 500 °C. X-ray diffraction (XRD) analysis revealed that pure SnO2 thin films exhibited an amorphous structure on both substrates. In contrast, the Cu-doped SnO2 sample on the glass substrate maintained its amorphous state, while the sample on the FTO substrate transitioned to a tetragonal rutile structure. Thermal annealing further induced a transformation to a tetragonal rutile structure for samples on both substrates. Energy dispersive spectroscopy (EDS) confirmed the incorporation of Cu into the SnO2 films. The estimated crystallite sizes ranged from 16 to 20 nm for the glass substrate and from 20 to 31 nm for the FTO substrate. Field emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM) analyses demonstrated uniform surface morphology with a smooth texture and strong adhesion to the substrates. The band gap energy (Eg) values for the unannealed samples were found to be 3.52, 3.40, 3.50, and 3.29 eV. Notably, Cu doping and the deposition of SnO2 films on FTO substrates resulted in a reduction of the band gap. These findings provide valuable insights into the effects of Cu doping, annealing, and substrate type on the structural and optical properties of SnO2, paving the way for advanced optoelectronic applications.

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来源期刊
Brazilian Journal of Physics
Brazilian Journal of Physics 物理-物理:综合
CiteScore
2.50
自引率
6.20%
发文量
189
审稿时长
6.0 months
期刊介绍: The Brazilian Journal of Physics is a peer-reviewed international journal published by the Brazilian Physical Society (SBF). The journal publishes new and original research results from all areas of physics, obtained in Brazil and from anywhere else in the world. Contents include theoretical, practical and experimental papers as well as high-quality review papers. Submissions should follow the generally accepted structure for journal articles with basic elements: title, abstract, introduction, results, conclusions, and references.
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