基于对比学习的标签嵌入晶圆缺陷分类算法

IF 3.4 3区 计算机科学 Q2 COMPUTER SCIENCE, INFORMATION SYSTEMS IEEE Access Pub Date : 2025-01-09 DOI:10.1109/ACCESS.2025.3527491
Jeongjoon Hwang;Somi Ha;Dohyun Kim
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引用次数: 0

摘要

在晶圆制造过程中对晶圆缺陷进行分类对于保证高质量生产、优化工艺和降低成本越来越重要。现有的晶圆图缺陷分类方法大多仅依靠图像进行模型训练和预测。然而,这些方法通常缺乏可解释性,这可能会阻碍过程改进和解决问题的努力。换句话说,现有的方法只计算特定图像属于每个类的概率,很难从视觉上判断图像属于特定类的原因。此外,这些方法使得评估每个类别的新图像的距离具有挑战性。此外,很难获得每个类别的代表性图像。为了解决这些限制,我们提出了一种新的晶圆缺陷分类方法,使用对比学习和标签嵌入。该方法旨在通过标签嵌入的对比学习,将标签信息和晶圆缺陷图像映射到一个共享的潜在空间中。这不仅有助于从图像中预测缺陷类别,而且还通过可视化图像和缺陷(标签)之间的关系以及提供具有代表性的缺陷图像来增强可解释性。此外,与以前的方法相比,即使在标签不平衡的情况下,我们的方法也表现出更好的分类性能和计算效率。该方法在识别未在原始分类任务中定义的未见缺陷方面也显示出巨大的潜力。因此,所提出的方法将其适用性扩展到晶圆图缺陷模式之外,显示出在各种领域使用的良好潜力。
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Wafer Defect Classification Algorithm With Label Embedding Using Contrastive Learning
Classifying wafer defects in the wafer manufacturing process is increasingly critical for ensuring high-quality production, optimizing processes, and reducing costs. Most existing methods for wafer map defect classification primarily rely on images alone for model training and prediction. However, these approaches often lack interpretability, which can hinder process improvement and problem-solving efforts. In other words, existing methods only calculate the probability of a specific image belonging to each class, making it difficult to visually judge why the image belongs to a particular class. Additionally, these methods make it challenging to assess the distance of new images from each class. Furthermore, it is difficult to obtain representative images of each class. To address these limitations, we propose a novel approach for wafer defect classification using contrastive learning with label embedding. The proposed method aims to map label information and wafer defect images into a shared latent space through contrastive learning using label embedding. This not only facilitates defect class prediction from images but also enhances interpretability by visualizing relationships between images and defects (labels) and providing representative defect images. Moreover, compared to previous methods, our approach demonstrates better classification performance and computational efficiency, even in situations with imbalanced labels. This method also shows significant potential in identifying unseen defects not defined in the original classification tasks. Consequently, the proposed approach extends its applicability beyond wafer map defect patterns, showing promising potential for use in various domains.
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来源期刊
IEEE Access
IEEE Access COMPUTER SCIENCE, INFORMATION SYSTEMSENGIN-ENGINEERING, ELECTRICAL & ELECTRONIC
CiteScore
9.80
自引率
7.70%
发文量
6673
审稿时长
6 weeks
期刊介绍: IEEE Access® is a multidisciplinary, open access (OA), applications-oriented, all-electronic archival journal that continuously presents the results of original research or development across all of IEEE''s fields of interest. IEEE Access will publish articles that are of high interest to readers, original, technically correct, and clearly presented. Supported by author publication charges (APC), its hallmarks are a rapid peer review and publication process with open access to all readers. Unlike IEEE''s traditional Transactions or Journals, reviews are "binary", in that reviewers will either Accept or Reject an article in the form it is submitted in order to achieve rapid turnaround. Especially encouraged are submissions on: Multidisciplinary topics, or applications-oriented articles and negative results that do not fit within the scope of IEEE''s traditional journals. Practical articles discussing new experiments or measurement techniques, interesting solutions to engineering. Development of new or improved fabrication or manufacturing techniques. Reviews or survey articles of new or evolving fields oriented to assist others in understanding the new area.
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