半导体中的绿色材料：从IRDS超越cmos路线图的视角。

IF 2.8 4区材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Nanotechnology Pub Date : 2025-02-19 DOI:10.1088/1361-6528/adb041

Akiko Ueda, Hiroyuki Akinaga, Sapan Agarwal, Joseph A Hagmann, Shamik Das, Matthew J Marinella, An Chen

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引用次数: 0

摘要

环境、安全、健康和可持续发展（ESHS）已成为半导体行业不可或缺的问题。国际器件和系统路线图（IRDS）的“超越CMOS”一章介绍了“绿色材料”的概念，强调了它们在半导体制造中保持可持续性的重要性。我们从“绿色材料”的角度讨论了新兴建筑和设备的当前趋势。此外，我们强调了基准和标准化在推进半导体行业可持续实践中的重要性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Green materials in semiconductors: perspective from the IRDS beyond-CMOS roadmap.

Environmental, safety, health, and sustainability (ESHS) have become an indispensable issue in the semiconductor industry. The 'Beyond CMOS' chapter of the International Roadmap for Devices and Systems roadmap introduces the concept of 'Green materials', emphasizing their importance for maintaining sustainability in semiconductor manufacturing. We discuss the current trends of emerging architectures and devices in the perspective of 'Green materials'. Additionally, we highlight the significance of benchmarking and standardization in advancing sustainable practices within the semiconductor industries.

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来源期刊

Nanotechnology 工程技术-材料科学：综合

CiteScore

7.10

自引率

5.70%

发文量

820

审稿时长

2.5 months

期刊介绍： The journal aims to publish papers at the forefront of nanoscale science and technology and especially those of an interdisciplinary nature. Here, nanotechnology is taken to include the ability to individually address, control, and modify structures, materials and devices with nanometre precision, and the synthesis of such structures into systems of micro- and macroscopic dimensions such as MEMS based devices. It encompasses the understanding of the fundamental physics, chemistry, biology and technology of nanometre-scale objects and how such objects can be used in the areas of computation, sensors, nanostructured materials and nano-biotechnology.