{"title":"基于雕刻机的样品微标记装置","authors":"E. Yu. Shelkovnikov, P. V. Gulyaev, K. S. Ermolin","doi":"10.1134/S0020441224701665","DOIUrl":null,"url":null,"abstract":"<p>The article relates to the field of contact power nano- and microlithography used for marking samples and surface areas examined with high-resolution microscopes. The device of a marking machine built on the basis of a commercially available Generic-CNC2418 engraving machine with program control in G-codes and using a tungsten probe as a working tool is described. A process for operating the motors of the marking machine based on the monitoring of the probe-surface contact by means of an optical microscope is described. The marking obtained with the help of such a probe is a pattern of individual probe imprints. The marker drives ensure positioning accuracy of 10 μm. The transverse size of the resulting marking prints is 10–15 μm. The marker is recommended for use on surfaces with a roughness of Ra no more than 0.1 μm and a Mohs hardness of no more than 7.5.</p>","PeriodicalId":587,"journal":{"name":"Instruments and Experimental Techniques","volume":"67 5","pages":"1018 - 1023"},"PeriodicalIF":0.4000,"publicationDate":"2025-02-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Micromarking Device for Samples Based on an Engraving Machine\",\"authors\":\"E. Yu. Shelkovnikov, P. V. Gulyaev, K. S. Ermolin\",\"doi\":\"10.1134/S0020441224701665\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>The article relates to the field of contact power nano- and microlithography used for marking samples and surface areas examined with high-resolution microscopes. The device of a marking machine built on the basis of a commercially available Generic-CNC2418 engraving machine with program control in G-codes and using a tungsten probe as a working tool is described. A process for operating the motors of the marking machine based on the monitoring of the probe-surface contact by means of an optical microscope is described. The marking obtained with the help of such a probe is a pattern of individual probe imprints. The marker drives ensure positioning accuracy of 10 μm. The transverse size of the resulting marking prints is 10–15 μm. The marker is recommended for use on surfaces with a roughness of Ra no more than 0.1 μm and a Mohs hardness of no more than 7.5.</p>\",\"PeriodicalId\":587,\"journal\":{\"name\":\"Instruments and Experimental Techniques\",\"volume\":\"67 5\",\"pages\":\"1018 - 1023\"},\"PeriodicalIF\":0.4000,\"publicationDate\":\"2025-02-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Instruments and Experimental Techniques\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://link.springer.com/article/10.1134/S0020441224701665\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"ENGINEERING, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Instruments and Experimental Techniques","FirstCategoryId":"5","ListUrlMain":"https://link.springer.com/article/10.1134/S0020441224701665","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, MULTIDISCIPLINARY","Score":null,"Total":0}
Micromarking Device for Samples Based on an Engraving Machine
The article relates to the field of contact power nano- and microlithography used for marking samples and surface areas examined with high-resolution microscopes. The device of a marking machine built on the basis of a commercially available Generic-CNC2418 engraving machine with program control in G-codes and using a tungsten probe as a working tool is described. A process for operating the motors of the marking machine based on the monitoring of the probe-surface contact by means of an optical microscope is described. The marking obtained with the help of such a probe is a pattern of individual probe imprints. The marker drives ensure positioning accuracy of 10 μm. The transverse size of the resulting marking prints is 10–15 μm. The marker is recommended for use on surfaces with a roughness of Ra no more than 0.1 μm and a Mohs hardness of no more than 7.5.
期刊介绍：
Instruments and Experimental Techniques is an international peer reviewed journal that publishes reviews describing advanced methods for physical measurements and techniques and original articles that present techniques for physical measurements, principles of operation, design, methods of application, and analysis of the operation of physical instruments used in all fields of experimental physics and when conducting measurements using physical methods and instruments in astronomy, natural sciences, chemistry, biology, medicine, and ecology.
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