Preparation and Synthesis of Polycrystalline InGaZnO4 via Tartaric Acid Mediated Sol–Gel Method

Abstract—A sol–gel method is developed to synthesize ternary indium–gallium–zinc oxide using tartaric acid as an organic complexing agent. The synthesized samples were examined by X-ray diffraction and transmission and scanning electron microscopy. Summarizing the consistent results of these research methods, we can state that the sizes of the particles composing the synthesized samples depend on the synthesis temperature: agglomerates of nanoparticles form at the lowest of synthesis temperatures, and micron-sized particles are detected after sintering at 900°C. The crystallinity of the samples increases with the synthesis temperature. All samples have no impurity crystalline phases and exhibit a uniform indium, gallium and zinc distribution over the sample volume.