二维结构厚度测量的干涉技术

IF 2.5 3区 物理与天体物理 Q2 OPTICS Optics Communications Pub Date : 2025-04-01 Epub Date: 2025-01-23 DOI:10.1016/j.optcom.2025.131555
Athira A, Alok Sharan
{"title":"二维结构厚度测量的干涉技术","authors":"Athira A,&nbsp;Alok Sharan","doi":"10.1016/j.optcom.2025.131555","DOIUrl":null,"url":null,"abstract":"<div><div>In this study, we obtain the thickness of films deposited on a glass slide by an in-house built experimental setup based on speckle interferometry (SI) and Doppler-shifted optical coherence tomography (D-OCT) techniques. Three different film textures, a transparent, semi-transparent film (Graphene Oxide-Poly vinyl alcohol composite film) and a highly scattered film (Biofilm formed during wastewater treatment out of chemical and biological activity), were used to test the accuracy in the measurement process of our optical system. The thickness range compares favorably with those measured by SEM cross-sections. In addition to the thickness of the film, we can extract the thickness variation of the film within the illuminated area from the one-time measurement process. The novelty of the work stands in the successful extraction and comparison of the film parameters in a low-cost instrumental facility utilizing teaching lab equipment of films with varying textures viz transparent film to scattering films from the same setup.</div></div>","PeriodicalId":19586,"journal":{"name":"Optics Communications","volume":"579 ","pages":"Article 131555"},"PeriodicalIF":2.5000,"publicationDate":"2025-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Interferometric techniques for thickness measurement of 2D structures\",\"authors\":\"Athira A,&nbsp;Alok Sharan\",\"doi\":\"10.1016/j.optcom.2025.131555\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>In this study, we obtain the thickness of films deposited on a glass slide by an in-house built experimental setup based on speckle interferometry (SI) and Doppler-shifted optical coherence tomography (D-OCT) techniques. Three different film textures, a transparent, semi-transparent film (Graphene Oxide-Poly vinyl alcohol composite film) and a highly scattered film (Biofilm formed during wastewater treatment out of chemical and biological activity), were used to test the accuracy in the measurement process of our optical system. The thickness range compares favorably with those measured by SEM cross-sections. In addition to the thickness of the film, we can extract the thickness variation of the film within the illuminated area from the one-time measurement process. The novelty of the work stands in the successful extraction and comparison of the film parameters in a low-cost instrumental facility utilizing teaching lab equipment of films with varying textures viz transparent film to scattering films from the same setup.</div></div>\",\"PeriodicalId\":19586,\"journal\":{\"name\":\"Optics Communications\",\"volume\":\"579 \",\"pages\":\"Article 131555\"},\"PeriodicalIF\":2.5000,\"publicationDate\":\"2025-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optics Communications\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0030401825000835\",\"RegionNum\":3,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"2025/1/23 0:00:00\",\"PubModel\":\"Epub\",\"JCR\":\"Q2\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics Communications","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0030401825000835","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2025/1/23 0:00:00","PubModel":"Epub","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}
引用次数: 0

摘要

在这项研究中,我们通过基于散斑干涉(SI)和多普勒偏移光学相干层析成像(D-OCT)技术的内部实验装置获得了沉积在玻璃载玻片上的薄膜厚度。三种不同的膜结构,透明、半透明膜(氧化石墨烯-聚乙烯醇复合膜)和高度分散膜(废水处理过程中由于化学和生物活性而形成的生物膜),被用来测试我们光学系统测量过程中的准确性。厚度范围与SEM截面测量值比较有利。除了薄膜的厚度外,我们还可以从一次性测量过程中提取照明区域内薄膜的厚度变化。这项工作的新颖之处在于,在一个低成本的仪器设备中,利用教学实验室设备成功地提取和比较了具有不同纹理的薄膜,即透明薄膜和来自相同设置的散射薄膜。
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Interferometric techniques for thickness measurement of 2D structures
In this study, we obtain the thickness of films deposited on a glass slide by an in-house built experimental setup based on speckle interferometry (SI) and Doppler-shifted optical coherence tomography (D-OCT) techniques. Three different film textures, a transparent, semi-transparent film (Graphene Oxide-Poly vinyl alcohol composite film) and a highly scattered film (Biofilm formed during wastewater treatment out of chemical and biological activity), were used to test the accuracy in the measurement process of our optical system. The thickness range compares favorably with those measured by SEM cross-sections. In addition to the thickness of the film, we can extract the thickness variation of the film within the illuminated area from the one-time measurement process. The novelty of the work stands in the successful extraction and comparison of the film parameters in a low-cost instrumental facility utilizing teaching lab equipment of films with varying textures viz transparent film to scattering films from the same setup.
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来源期刊
Optics Communications
Optics Communications 物理-光学
CiteScore
5.10
自引率
8.30%
发文量
681
审稿时长
38 days
期刊介绍: Optics Communications invites original and timely contributions containing new results in various fields of optics and photonics. The journal considers theoretical and experimental research in areas ranging from the fundamental properties of light to technological applications. Topics covered include classical and quantum optics, optical physics and light-matter interactions, lasers, imaging, guided-wave optics and optical information processing. Manuscripts should offer clear evidence of novelty and significance. Papers concentrating on mathematical and computational issues, with limited connection to optics, are not suitable for publication in the Journal. Similarly, small technical advances, or papers concerned only with engineering applications or issues of materials science fall outside the journal scope.
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