Multi-level alterable transportation of a two-dimensional near-field acoustic levitation platform

Near-field acoustic levitation (NFAL) is an innovative contactless handling technology with broad applications in precision manufacturing equipment and micro-electrical mechanical systems. The study systematically investigates the multi-level alterable transportation characteristics of a novel two-dimensional non-contact platform based on NFAL technology. The thrust forces in the x- and y-directions provided by the two-dimensional platform on the levitation plate are primarily influenced and adjusted by the amplitudes of the holed and bumped rails, respectively. Therefore, the levitation plate enables multi-level alterable transportation under different operation conditions by adjusting the vibration characteristics of two rails and the physical parameters. The theoretical model, including the governing equation of the squeeze film and the motion equation of the levitation plate, is established to analyze the mechanical and transportation performances. An experimental testbed is constructed to verify the numerical analysis solved by the theoretical model. Both numerical and experimental results demonstrate that the levitation plate can be moved along various angles from a stationary state, termed static multi-angle motion, by adjusting the relative amplitudes of the two rails. Additionally, the experimental results confirm that the levitation plate can perform dynamic turning motion from an initial running state under various operational conditions. The validated multi-level alterable transportation capability highlights the potential of the two-dimensional non-contact platform in precision manufacturing equipment and micro-electromechanical systems.