半导体硅晶体的生长

IF 4.5 2区 材料科学 Q1 CRYSTALLOGRAPHY Progress in Crystal Growth and Characterization of Materials Pub Date : 2016-06-01 DOI:10.1016/j.pcrysgrow.2016.04.014
Koichi Kakimoto, Bing Gao, Xin Liu, Satoshi Nakano
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引用次数: 18

摘要

本文重点介绍了大规模集成电路用硅的Czochralski (CZ)晶体生长和太阳能电池用定向凝固法生长多晶硅的最新进展。目前采用CZ法生长硅晶体可以生长出高质量的晶体,满足lsi或电动汽车功率器件的器件要求。本文介绍了如何获得低杂质含量和少点缺陷的高质量晶体。它还涵盖了定向凝固方法,这种方法可以产生具有中等转换效率的晶体,用于光伏应用。我们讨论了降低效率的缺陷和杂质以及克服这些问题的步骤。
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Growth of semiconductor silicon crystals

This paper focuses on the recent developments in Czochralski (CZ) crystal growth of silicon for large-scale integrated circuits (LSIs) and multi-crystalline silicon growth using a directional solidification method for solar cells. Growth of silicon crystals by the CZ method currently allows the growth of high-quality crystals that satisfy the device requirements of LSIs or power devices for electric cars. This paper covers how to obtain high-quality crystals with low impurity content and few point defects. It also covers the directional solidification method, which yields crystals with medium conversion efficiency for photovoltaic applications. We discuss the defects and impurities that degrade the efficiency and the steps to overcome these problems.

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来源期刊
Progress in Crystal Growth and Characterization of Materials
Progress in Crystal Growth and Characterization of Materials 工程技术-材料科学:表征与测试
CiteScore
8.80
自引率
2.00%
发文量
10
审稿时长
1 day
期刊介绍: Materials especially crystalline materials provide the foundation of our modern technologically driven world. The domination of materials is achieved through detailed scientific research. Advances in the techniques of growing and assessing ever more perfect crystals of a wide range of materials lie at the roots of much of today''s advanced technology. The evolution and development of crystalline materials involves research by dedicated scientists in academia as well as industry involving a broad field of disciplines including biology, chemistry, physics, material sciences and engineering. Crucially important applications in information technology, photonics, energy storage and harvesting, environmental protection, medicine and food production require a deep understanding of and control of crystal growth. This can involve suitable growth methods and material characterization from the bulk down to the nano-scale.
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