在具有重叠栅极-源极接触、漏极-肖特基接触和本征SiGe袋的简单iTFET中增强亚阈值斜率和导通电流。

IF 4.703 3区 材料科学 Nanoscale Research Letters Pub Date : 2023-09-29 DOI:10.1186/s11671-023-03904-7
Jyi-Tsong Lin, Kuan-Pin Lin, Kai-Ming Cheng
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引用次数: 0

摘要

在本文中,我们提出了一种新的简单iTFET,它具有重叠的栅极-源极接触(SGO)、漏极-肖特基接触和本征SiGe口袋(口袋SGO-iTFET)。其目的是实现陡峭的亚阈值摆动(S.S)和高离子电流。通过优化栅极和源极接触重叠,显著提高了隧道效率,同时抑制了双极效应。此外,在漏极/源极使用肖特基接触,而不是离子注入漏极/漏极,减少了漏电流和热预算。此外,隧穿区被本征SiGe口袋所取代,该口袋具有更窄的带隙,这增加了带到带隧穿的概率并增强了离子电流。我们的模拟是基于实际过程的可行性,彻底的Sentaurus TCAD模拟表明,Pocket SGO iTFET表现出S.Savg的平均和最小亚阈值摆动 = 16.2 mV/Dec和S.Smin = 4.62mV/Dec。VD = 0.2 V,离子电流为1.81[公式:见正文]10-6 A/μm,离子/IOFF比为1.34[公式:参见正文]109。Pocket SGO iTFET设计在物联网(IoT)和人工智能应用所需的超低功耗设备方面显示出巨大潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Enhancing subthreshold slope and ON-current in a simple iTFET with overlapping gate on source-contact, drain Schottky contact, and intrinsic SiGe-pocket

In this paper, we present a new novel simple iTFET with overlapping gate on source-contact (SGO), Drain Schottky Contact, and intrinsic SiGe pocket (Pocket-SGO iTFET). The aim is to achieve steep subthreshold swing (S.S) and high ION current. By optimizing the gate and source-contact overlap, the tunneling efficiency is significantly enhanced, while the ambipolar effect is suppressed. Additionally, using a Schottky contact at the drain/source, instead of ion implantation drain/source, reduces leakage current and thermal budget. Moreover, the tunneling region is replaced by an intrinsic SiGe pocket posing a narrower bandgap, which increases the probability of band-to-band tunneling and enhances the ION current. Our simulations are based on the feasibility of the actual process, thorough Sentaurus TCAD simulations demonstrate that the Pocket-SGO iTFET exhibits an average and minimum subthreshold swing of S.Savg = 16.2 mV/Dec and S.Smin = 4.62 mV/Dec, respectively. At VD = 0.2 V, the ION current is 1.81 \(\times\) 10–6 A/μm, and the ION/IOFF ratio is 1.34 \(\times\) 109. The Pocket-SGO iTFET design shows great potential for ultra-low-power devices that are required for the Internet of Things (IoT) and AI applications.

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来源期刊
Nanoscale Research Letters
Nanoscale Research Letters NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
15.00
自引率
0.00%
发文量
110
审稿时长
2.5 months
期刊介绍: Nanoscale Research Letters (NRL) provides an interdisciplinary forum for communication of scientific and technological advances in the creation and use of objects at the nanometer scale. NRL is the first nanotechnology journal from a major publisher to be published with Open Access.
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