DTFab：一种基于数字孪生的半导体光刻优化网格管理方法

{"title":"DTFab：一种基于数字孪生的半导体光刻优化网格管理方法","authors":"Chandrasekhar Komaralingam Sivasubramanian, Robert W. Dodge, Aditya S. Ramani, David Bayba, M. Janakiram, Eric Butcher, Joseph Gonzales, Giulia Pedrielli","doi":"10.1007/s11518-023-5564-x","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":17150,"journal":{"name":"Journal of Systems Science and Systems Engineering","volume":null,"pages":null},"PeriodicalIF":1.7000,"publicationDate":"2023-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"DTFab: A Digital Twin based Approach for Optimal Reticle Management in Semiconductor Photolithography\",\"authors\":\"Chandrasekhar Komaralingam Sivasubramanian, Robert W. Dodge, Aditya S. Ramani, David Bayba, M. Janakiram, Eric Butcher, Joseph Gonzales, Giulia Pedrielli\",\"doi\":\"10.1007/s11518-023-5564-x\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":17150,\"journal\":{\"name\":\"Journal of Systems Science and Systems Engineering\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.7000,\"publicationDate\":\"2023-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Systems Science and Systems Engineering\",\"FirstCategoryId\":\"91\",\"ListUrlMain\":\"https://doi.org/10.1007/s11518-023-5564-x\",\"RegionNum\":4,\"RegionCategory\":\"管理学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"OPERATIONS RESEARCH & MANAGEMENT SCIENCE\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Systems Science and Systems Engineering","FirstCategoryId":"91","ListUrlMain":"https://doi.org/10.1007/s11518-023-5564-x","RegionNum":4,"RegionCategory":"管理学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"OPERATIONS RESEARCH & MANAGEMENT SCIENCE","Score":null,"Total":0}