高精度离轴非球面离子束加工位置-姿态优化

Mingjin Xu, Yi-fan Dai, Xuhui Xie, Lin Zhou
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引用次数: 1

摘要

高精度离轴非球面元件广泛应用于各种高性能光学系统中。然而,离轴非球面的复杂制造特性使得传统的光学制造方法难以实现高精度的表面。离子束成像(IBF)是一种非接触、高确定性的最终精密光学成像方法。本文讨论了两种不同的加工位置姿态模型,这两种模型对IBF的加工难度和加工精度有很大影响。基于IBF去除函数对目标距离和入射角小扰动的鲁棒性,建立了儿童反射镜坐标位置姿态模型(CCPAM),可以有效地降低凹陷高度和入射角,从而降低光束误差和加工难度。基于CCPAM及其最佳拟合球面,成功地将线性三轴IBF系统应用于大口径抛物面离轴非球面镜的成像。在113分钟的两次迭代中,表面误差降至7.658 nm RMS(有效孔径310 mm×310 mm)。计算结果表明,IBF可以实现基于加工位置姿态优化的高精度离轴非球面的快速制造。
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Machining position-attitude optimisation in ion beam figuring of high-precision off-axis aspheric surfaces
High-precision off-axis aspheric components are widely applied in various high-performance optical systems. However, the complicated manufacturing features of off-axis aspheric make it difficult to achieve high-precision surface for traditional optical manufacturing methods. Ion beam figuring (IBF) is a non-contact and highly deterministic method for the final precision optical figuring. In this paper, two different machining position-attitude models are discussed, which have great influence on the machining difficulty and figuring accuracy of IBF. The child mirror coordinate position-attitude model (CCPAM), which is based on the robustness of IBF removal function to small disturbance of target distance and incidence angle, can effectively decrease the sag height and incidence angle, thereby reduce the beam errors and machining difficulty. A linear three-axis IBF system is successfully applied for the figuring of a large-aperture parabolic off-axis aspheric mirror based on the CCPAM and its best-fit sphere. With two iterations of 113 min, surface error is down to 7.658 nm RMS (effective aperture 310 mm × 310 mm). The figuring results indicate IBF can realise the rapid fabrication of high-precision off-axis aspheric based on the machining position-attitude optimisation.
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来源期刊
International Journal of Nanomanufacturing
International Journal of Nanomanufacturing Engineering-Industrial and Manufacturing Engineering
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0.60
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