{"title":"LS-WEDT表面粗糙度速度参数的实验研究及其在微电极制作中的应用","authors":"Y. Gong, Yao Sun, Xiaoteng Ma","doi":"10.1504/IJAT.2018.10016142","DOIUrl":null,"url":null,"abstract":"The demand for microelectrodes has greatly increased when the micromachining techniques have become a hot issue in modern industry. The non-contact of EDM process makes it have the unique superiority in fabricating microelectrodes. Therefore, this paper proposed a low speed wire electrical discharge turning (LS-WEDT) method to fabricate microelectrodes. Firstly, the influence of speed parameters including the rotated speed (Vn), feeding speed (Vs) and wire speed (Vw) involved in LS-WEDT are discussed. More importantly, the microelectrode made of CuW70 material with diameter of 58 μm is firstly and successfully fabricated by LS-WEDT. Furthermore, the scanning electron microscope observations disclosed that the microelectrode has good surface quality and high machining precision without ridges and bending. Besides, many small micro-voids with the diameter less than 1 μm can be observed on the microelectrode surface. Finally, the energy dispersive spectrograph analysis suggested the presence of foreign elements including zinc and oxygen on the microelectrode surface machined by LS-WEDT.","PeriodicalId":39039,"journal":{"name":"International Journal of Abrasive Technology","volume":"8 1","pages":"261"},"PeriodicalIF":0.0000,"publicationDate":"2018-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"An experimental study for evaluating speed parameters on surface roughness of LS-WEDT and its application in fabricating microelectrodes\",\"authors\":\"Y. Gong, Yao Sun, Xiaoteng Ma\",\"doi\":\"10.1504/IJAT.2018.10016142\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The demand for microelectrodes has greatly increased when the micromachining techniques have become a hot issue in modern industry. The non-contact of EDM process makes it have the unique superiority in fabricating microelectrodes. Therefore, this paper proposed a low speed wire electrical discharge turning (LS-WEDT) method to fabricate microelectrodes. Firstly, the influence of speed parameters including the rotated speed (Vn), feeding speed (Vs) and wire speed (Vw) involved in LS-WEDT are discussed. More importantly, the microelectrode made of CuW70 material with diameter of 58 μm is firstly and successfully fabricated by LS-WEDT. Furthermore, the scanning electron microscope observations disclosed that the microelectrode has good surface quality and high machining precision without ridges and bending. Besides, many small micro-voids with the diameter less than 1 μm can be observed on the microelectrode surface. Finally, the energy dispersive spectrograph analysis suggested the presence of foreign elements including zinc and oxygen on the microelectrode surface machined by LS-WEDT.\",\"PeriodicalId\":39039,\"journal\":{\"name\":\"International Journal of Abrasive Technology\",\"volume\":\"8 1\",\"pages\":\"261\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-09-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Abrasive Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1504/IJAT.2018.10016142\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"Engineering\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Abrasive Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1504/IJAT.2018.10016142","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"Engineering","Score":null,"Total":0}
An experimental study for evaluating speed parameters on surface roughness of LS-WEDT and its application in fabricating microelectrodes
The demand for microelectrodes has greatly increased when the micromachining techniques have become a hot issue in modern industry. The non-contact of EDM process makes it have the unique superiority in fabricating microelectrodes. Therefore, this paper proposed a low speed wire electrical discharge turning (LS-WEDT) method to fabricate microelectrodes. Firstly, the influence of speed parameters including the rotated speed (Vn), feeding speed (Vs) and wire speed (Vw) involved in LS-WEDT are discussed. More importantly, the microelectrode made of CuW70 material with diameter of 58 μm is firstly and successfully fabricated by LS-WEDT. Furthermore, the scanning electron microscope observations disclosed that the microelectrode has good surface quality and high machining precision without ridges and bending. Besides, many small micro-voids with the diameter less than 1 μm can be observed on the microelectrode surface. Finally, the energy dispersive spectrograph analysis suggested the presence of foreign elements including zinc and oxygen on the microelectrode surface machined by LS-WEDT.