离子束溅射HfO2薄膜的结晶行为及其对激光损伤阈值的影响

IF 1.9 4区物理与天体物理 Q3 OPTICS Journal of the European Optical Society-Rapid Publications Pub Date : 2021-03-06 DOI:10.1186/s41476-021-00147-w

Zoltán Balogh-Michels, Igor Stevanovic, Aurelio Borzi, Andreas Bächli, Daniel Schachtler, Thomas Gischkat, Antonia Neels, Alexander Stuck, Roelene Botha

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引用次数: 5

摘要

在这项工作中，我们介绍了离子束溅射铪在0001 SiO2衬底上的热结晶及其对激光诱导损伤阈值(LIDT)的影响。采用原位x射线衍射法对结晶过程进行了研究。我们确定结晶的活化能为2.6±0.5 eV。发现晶体的生长遵循二维生长模式。这与高活化能相结合，导致明显的层厚度依赖的结晶温度。LIDT测量值@355?在经过热处理的3个四分之一波厚半铪层上，在1?h @773 ?K治疗。热处理为5?h导致LIDT值显著增加。

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Crystallization behavior of ion beam sputtered HfO2 thin films and its effect on the laser-induced damage threshold

In this work, we present our results about the thermal crystallization of ion beam sputtered hafnia on 0001 SiO₂ substrates and its effect on the laser-induced damage threshold (LIDT). The crystallization process was studied using in-situ X-ray diffractometry. We determined an activation energy for crystallization of 2.6?±?0.5?eV. It was found that the growth of the crystallites follows a two-dimensional growth mode. This, in combination with the high activation energy, leads to an apparent layer thickness-dependent crystallization temperature. LIDT measurements @355?nm on thermally treated 3 quarter-wave thick hafnia layers show a decrement of the 0% LIDT for 1?h @773?K treatment. Thermal treatment for 5?h leads to a significant increment of the LIDT values.

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来源期刊

Journal of the European Optical Society-Rapid Publications 物理-光学

CiteScore

2.40

自引率

0.00%

发文量

审稿时长

5 weeks

期刊介绍： Rapid progress in optics and photonics has broadened its application enormously into many branches, including information and communication technology, security, sensing, bio- and medical sciences, healthcare and chemistry. Recent achievements in other sciences have allowed continual discovery of new natural mysteries and formulation of challenging goals for optics that require further development of modern concepts and running fundamental research. The Journal of the European Optical Society – Rapid Publications (JEOS:RP) aims to tackle all of the aforementioned points in the form of prompt, scientific, high-quality communications that report on the latest findings. It presents emerging technologies and outlining strategic goals in optics and photonics. The journal covers both fundamental and applied topics, including but not limited to: Classical and quantum optics Light/matter interaction Optical communication Micro- and nanooptics Nonlinear optical phenomena Optical materials Optical metrology Optical spectroscopy Colour research Nano and metamaterials Modern photonics technology Optical engineering, design and instrumentation Optical applications in bio-physics and medicine Interdisciplinary fields using photonics, such as in energy, climate change and cultural heritage The journal aims to provide readers with recent and important achievements in optics/photonics and, as its name suggests, it strives for the shortest possible publication time.