Jan Stiedl, Georgette Azemtsop M., B. Boldrini, S. Green, T. Chassé, K. Rebner
{"title":"基于可见高光谱成像技术的工业铜氧化层表征","authors":"Jan Stiedl, Georgette Azemtsop M., B. Boldrini, S. Green, T. Chassé, K. Rebner","doi":"10.1255/JSI.2019.A10","DOIUrl":null,"url":null,"abstract":"The detection and characterisation of oxide layers on metallic copper samples plays an important role for power\nelectronic modules in the automotive industry. However, since precise identification of oxide layers by visual inspection is\ndifficult and time consuming due to inhomogeneous colour distribution, a reliable and efficient method for estimating their\nthickness is needed. In this study, hyperspectral imaging in the visible wavelength range (425–725 nm) is proposed as an\nin-line inspection method for analysing oxide layers in real-time during processing of copper components such as printed\ncircuit boards in the automotive industry. For implementation in the production line a partial least square regression (PLSR)\nmodel was developed with a calibration set of n = 12 with about 13,000 spectra per sample to determine the oxide layer\nthickness on top of the technical copper surfaces. The model shows a good prediction performance in the range of 0–30\nnm compared to Auger electron spectroscopy depth profiles as a reference method. The root mean square error (RMSE)\nis 1.75 nm for calibration and 2.70 nm for full cross-validation. Applied to an external dataset of four new samples with\nabout 13,000 spectra per sample the model provides an RMSE of 1.84 nm for prediction and demonstrates the robustness\nof the model during real-time processing. The results of this study prove the ability and usefulness of the proposed method\n to estimate the thickness of oxide layers on technical copper. Hence, the application of hyperspectral imaging for the\nindustrial process control of electronic devices is very promising.","PeriodicalId":37385,"journal":{"name":"Journal of Spectral Imaging","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2019-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Characterisation of oxide layers on technical copper based on visible hyperspectral imaging\",\"authors\":\"Jan Stiedl, Georgette Azemtsop M., B. Boldrini, S. Green, T. Chassé, K. Rebner\",\"doi\":\"10.1255/JSI.2019.A10\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The detection and characterisation of oxide layers on metallic copper samples plays an important role for power\\nelectronic modules in the automotive industry. However, since precise identification of oxide layers by visual inspection is\\ndifficult and time consuming due to inhomogeneous colour distribution, a reliable and efficient method for estimating their\\nthickness is needed. In this study, hyperspectral imaging in the visible wavelength range (425–725 nm) is proposed as an\\nin-line inspection method for analysing oxide layers in real-time during processing of copper components such as printed\\ncircuit boards in the automotive industry. For implementation in the production line a partial least square regression (PLSR)\\nmodel was developed with a calibration set of n = 12 with about 13,000 spectra per sample to determine the oxide layer\\nthickness on top of the technical copper surfaces. The model shows a good prediction performance in the range of 0–30\\nnm compared to Auger electron spectroscopy depth profiles as a reference method. The root mean square error (RMSE)\\nis 1.75 nm for calibration and 2.70 nm for full cross-validation. Applied to an external dataset of four new samples with\\nabout 13,000 spectra per sample the model provides an RMSE of 1.84 nm for prediction and demonstrates the robustness\\nof the model during real-time processing. The results of this study prove the ability and usefulness of the proposed method\\n to estimate the thickness of oxide layers on technical copper. 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Characterisation of oxide layers on technical copper based on visible hyperspectral imaging
The detection and characterisation of oxide layers on metallic copper samples plays an important role for power
electronic modules in the automotive industry. However, since precise identification of oxide layers by visual inspection is
difficult and time consuming due to inhomogeneous colour distribution, a reliable and efficient method for estimating their
thickness is needed. In this study, hyperspectral imaging in the visible wavelength range (425–725 nm) is proposed as an
in-line inspection method for analysing oxide layers in real-time during processing of copper components such as printed
circuit boards in the automotive industry. For implementation in the production line a partial least square regression (PLSR)
model was developed with a calibration set of n = 12 with about 13,000 spectra per sample to determine the oxide layer
thickness on top of the technical copper surfaces. The model shows a good prediction performance in the range of 0–30
nm compared to Auger electron spectroscopy depth profiles as a reference method. The root mean square error (RMSE)
is 1.75 nm for calibration and 2.70 nm for full cross-validation. Applied to an external dataset of four new samples with
about 13,000 spectra per sample the model provides an RMSE of 1.84 nm for prediction and demonstrates the robustness
of the model during real-time processing. The results of this study prove the ability and usefulness of the proposed method
to estimate the thickness of oxide layers on technical copper. Hence, the application of hyperspectral imaging for the
industrial process control of electronic devices is very promising.
期刊介绍:
JSI—Journal of Spectral Imaging is the first journal to bring together current research from the diverse research areas of spectral, hyperspectral and chemical imaging as well as related areas such as remote sensing, chemometrics, data mining and data handling for spectral image data. We believe all those working in Spectral Imaging can benefit from the knowledge of others even in widely different fields. We welcome original research papers, letters, review articles, tutorial papers, short communications and technical notes.