基于可见高光谱成像技术的工业铜氧化层表征

Q3 Chemistry Journal of Spectral Imaging Pub Date : 2019-06-18 DOI:10.1255/JSI.2019.A10
Jan Stiedl, Georgette Azemtsop M., B. Boldrini, S. Green, T. Chassé, K. Rebner
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引用次数: 5

摘要

金属铜样品上氧化层的检测和表征对汽车工业中的电力电子模块起着重要作用。然而,由于颜色分布不均匀,通过目视检查精确识别氧化层既困难又耗时,因此需要一种可靠有效的方法来估计其厚度。在这项研究中,提出了可见光波长范围(425–725 nm)的高光谱成像作为一种在线检测方法,用于在汽车工业中印刷电路板等铜部件的加工过程中实时分析氧化物层。为了在生产线上实现,开发了一个偏最小二乘回归(PLSR)模型,该模型具有n=12的校准集,每个样本具有约13000个光谱,以确定技术铜表面顶部的氧化物层厚度。与作为参考方法的俄歇电子能谱深度剖面相比,该模型在0–30nm范围内显示出良好的预测性能。校准的均方根误差(RMSE)为1.75nm,全交叉验证的均方根偏差为2.70nm。该模型应用于四个新样本的外部数据集,每个样本约有13000个光谱,为预测提供了1.84nm的均方根误差,并证明了该模型在实时处理过程中的稳健性。这项研究的结果证明了所提出的方法估计工业铜上氧化层厚度的能力和有用性。因此,高光谱成像在电子设备工业过程控制中的应用非常有前景。
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Characterisation of oxide layers on technical copper based on visible hyperspectral imaging
The detection and characterisation of oxide layers on metallic copper samples plays an important role for power electronic modules in the automotive industry. However, since precise identification of oxide layers by visual inspection is difficult and time consuming due to inhomogeneous colour distribution, a reliable and efficient method for estimating their thickness is needed. In this study, hyperspectral imaging in the visible wavelength range (425–725 nm) is proposed as an in-line inspection method for analysing oxide layers in real-time during processing of copper components such as printed circuit boards in the automotive industry. For implementation in the production line a partial least square regression (PLSR) model was developed with a calibration set of n = 12 with about 13,000 spectra per sample to determine the oxide layer thickness on top of the technical copper surfaces. The model shows a good prediction performance in the range of 0–30 nm compared to Auger electron spectroscopy depth profiles as a reference method. The root mean square error (RMSE) is 1.75 nm for calibration and 2.70 nm for full cross-validation. Applied to an external dataset of four new samples with about 13,000 spectra per sample the model provides an RMSE of 1.84 nm for prediction and demonstrates the robustness of the model during real-time processing. The results of this study prove the ability and usefulness of the proposed method to estimate the thickness of oxide layers on technical copper. Hence, the application of hyperspectral imaging for the industrial process control of electronic devices is very promising.
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来源期刊
Journal of Spectral Imaging
Journal of Spectral Imaging Chemistry-Analytical Chemistry
CiteScore
3.90
自引率
0.00%
发文量
11
审稿时长
22 weeks
期刊介绍: JSI—Journal of Spectral Imaging is the first journal to bring together current research from the diverse research areas of spectral, hyperspectral and chemical imaging as well as related areas such as remote sensing, chemometrics, data mining and data handling for spectral image data. We believe all those working in Spectral Imaging can benefit from the knowledge of others even in widely different fields. We welcome original research papers, letters, review articles, tutorial papers, short communications and technical notes.
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