MEMS中自由分子电流的积分方程:最新进展

IF 0.3 Q4 MATHEMATICS Communications in Applied and Industrial Mathematics Pub Date : 2017-03-28 DOI:10.1515/caim-2017-0004

P. Fedeli, A. Frangi

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引用次数: 1

摘要

摘要本文提出了一种边界积分方程(BIE)方法来分析微机电系统(MEMS)近真空中的气体耗散。受计算机图形学中辐射方程的启发，我们讨论了一种计算可见积分域的有效方法。此外，我们通过开发一套平面多面体域的解析公式来解决近奇异积分问题。最后用文献中的实验结果进行了验证。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Integral equations for free-molecule ow in MEMS: recent advancements

Abstract We address a Boundary Integral Equation (BIE) approach for the analysis of gas dissipation in near-vacuum for Micro Electro Mechanical Systems (MEMS). Inspired by an analogy with the radiosity equation in computer graphics, we discuss an efficient way to compute the visible domain of integration. Moreover, we tackle the issue of near singular integrals by developing a set of analytical formulas for planar polyhedral domains. Finally a validation with experimental results taken from the literature is presented.

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来源期刊

Communications in Applied and Industrial Mathematics Mathematics-Applied Mathematics

CiteScore

1.30

自引率

0.00%

发文量

审稿时长

16 weeks

期刊介绍： Communications in Applied and Industrial Mathematics (CAIM) is one of the official journals of the Italian Society for Applied and Industrial Mathematics (SIMAI). Providing immediate open access to original, unpublished high quality contributions, CAIM is devoted to timely report on ongoing original research work, new interdisciplinary subjects, and new developments. The journal focuses on the applications of mathematics to the solution of problems in industry, technology, environment, cultural heritage, and natural sciences, with a special emphasis on new and interesting mathematical ideas relevant to these fields of application . Encouraging novel cross-disciplinary approaches to mathematical research, CAIM aims to provide an ideal platform for scientists who cooperate in different fields including pure and applied mathematics, computer science, engineering, physics, chemistry, biology, medicine and to link scientist with professionals active in industry, research centres, academia or in the public sector. Coverage includes research articles describing new analytical or numerical methods, descriptions of modelling approaches, simulations for more accurate predictions or experimental observations of complex phenomena, verification/validation of numerical and experimental methods; invited or submitted reviews and perspectives concerning mathematical techniques in relation to applications, and and fields in which new problems have arisen for which mathematical models and techniques are not yet available.