ITO中间层抑制氧化还原反应对p型SnO TFT性能的控制

IF 3.7 3区 工程技术 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Journal of Information Display Pub Date : 2022-11-30 DOI:10.1080/15980316.2022.2151522
Su-Hwan Choi, Hye-mi Kim, Jinsin Park
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引用次数: 0

摘要

通过比较镍电极和ITO电极,我们找到了一种简便的方法来控制p型SnO TFT的性能。镍电极TFT具有3.3 cm2/Vs的高场效应迁移率和3.6 × 101的低通断电流比。与Ni相比,ito电极TFT具有1.4 cm2/Vs的低场效应迁移率和1.1 × 103的高开/关电流比。利用各种分析方法,我们提出了SnO TFT的电学性能因电极材料的不同而不同的原因。首先,在退火过程中,SnO和Ni的界面发生氧化还原反应。其次,Ni与SnO形成类似欧姆的接触,降低了载流子的肖特基势垒高度。在Ni电极上采用ITO il,通过阻碍氧化还原反应来减少断流。随着ITO厚度的增加,tft的过流电流有效地减小。厚度为10nm的ITO IL可获得最佳的电学性能:场效应迁移率为2.5 cm2/Vs,离子/离合率为1.7 × 103, NBS为- 1.4 V时的V移。
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Facile control of p-type SnO TFT performance with restraining redox reaction by ITO interlayers
By comparing Ni and ITO electrodes of SnO TFT, we find a facile method to control p-type SnO TFT performance. A Ni-electrode TFT has a high field-effect mobility of 3.3 cm2/Vs and a low on/off current ratio of 3.6 × 101. Compared to Ni, ITO-electrode TFT has low field-effect mobility of 1.4 cm2/Vs and a high on/off current ratio of 1.1 × 103. Using various analysis methods, we suggested why the electrical properties of SnO TFT differed depending on the electrode materials. First, a redox reaction occurs at the interface of SnO and Ni during the post-annealing process. Second, Ni has an ohmic-like contact formation with SnO, which lowers the Schottky barrier height of carriers. ITO ILs are adopted to Ni electrode to reduce the off-current by hindering the redox reaction. The off-current of TFTs is effectively reduced with ITO ILs as thickness increases. An ITO IL that is 10-nm thick yields the optimum electrical properties: field-effect mobility of 2.5 cm2/Vs, Ion/Ioff of 1.7 × 103 and Vth shift under NBS of −1.4 V.
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来源期刊
Journal of Information Display
Journal of Information Display MATERIALS SCIENCE, MULTIDISCIPLINARY-
CiteScore
7.10
自引率
5.40%
发文量
27
审稿时长
30 weeks
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