微机械光学加速度计综述:从mg到亚μg

IF 15.3 1区 物理与天体物理 Q1 OPTICS Opto-Electronic Advances Pub Date : 2021-03-25 DOI:10.29026/OEA.2021.200045
Qianbo Lu, Yinan Wang, Xiaoxu Wang, Yuan Yao, Xuewen Wang, Wei Huang
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引用次数: 30

摘要

微光电系统(MOEMS)加速度计是一种结合了光学测量和微机电系统(MEMS)优点的新型加速度计,能够实现高精度、小体积和抗电磁干扰的加速度测量。近年来,随着MOEMS加速度计的深入研究和发展,在地震监测、惯性导航、航空航天等工业和军事领域的应用前景一片广阔。MOEMS加速度计的设计方案多种多样,但由于测量原理和应用要求的不同,其性能差异很大。本文旨在解决当前MOEMS加速度计缺乏系统综述的紧迫问题。根据光学测量原理,将MOEMS加速度计分为几何光学加速度计、波光学加速度计和新型光机械加速度计三类。作为研究最广泛的一类,基于波光学的加速度计又进一步分为基于光栅干涉腔、光纤布拉格光栅(FBG)、法布里-珀罗腔和光子晶体的四类。简要介绍了MOEMS加速度计的测量原理,在典型演示的基础上,讨论了各种MOEMS加速度计的典型性能、优缺点以及潜在的应用场景。本文还介绍了MOEMS加速度计的现状和发展趋势,以满足日益增长的高精度加速度测量需求。
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Review of micromachined optical accelerometers: from mg to sub-μg
Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume and anti-electromagnetic disturbance measurement of acceleration. In recent years, with the in-depth research and development of MOEMS accelerometers, the community is flourishing with the possible applications in seismic monitoring, inertial navigation, aerospace and other industrial and military fields. There have been a variety of schemes of MOEMS accelerometers, whereas the performances differ greatly due to different measurement principles and corresponding application requirements. This paper aims to address the pressing issue of the current lack of systematic review of MOEMS accelerometers. According to the optical measurement principle, we divide the MOEMS accelerometers into three categories: the geometric optics based, the wave optics based, and the new optomechanical accelerometers. Regarding the most widely studied category, the wave optics based accelerometers are further divided into four sub-categories, which is based on grating interferometric cavity, Fiber Bragg Grating (FBG), Fabry-Perot cavity, and photonic crystal, respectively. Following a brief introduction to the measurement principles, the typical performances, advantages and disadvantages as well as the potential application scenarios of all kinds of MOEMS accelerometers are discussed on the basis of typical demonstrations. This paper also presents the status and development tendency of MOEMS accelerometers to meet the ever-increasing demand for high-precision acceleration measurement.
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来源期刊
CiteScore
19.30
自引率
7.10%
发文量
128
期刊介绍: Opto-Electronic Advances (OEA) is a distinguished scientific journal that has made significant strides since its inception in March 2018. Here's a collated summary of its key features and accomplishments: Impact Factor and Ranking: OEA boasts an impressive Impact Factor of 14.1, which positions it within the Q1 quartiles of the Optics category. This high ranking indicates that the journal is among the top 25% of its field in terms of citation impact. Open Access and Peer Review: As an open access journal, OEA ensures that research findings are freely available to the global scientific community, promoting wider dissemination and collaboration. It upholds rigorous academic standards through a peer review process, ensuring the quality and integrity of the published research. Database Indexing: OEA's content is indexed in several prestigious databases, including the Science Citation Index (SCI), Engineering Index (EI), Scopus, Chemical Abstracts (CA), and the Index to Chinese Periodical Articles (ICI). This broad indexing facilitates easy access to the journal's articles by researchers worldwide. Scope and Purpose: OEA is committed to serving as a platform for the exchange of knowledge through the publication of high-quality empirical and theoretical research papers. It covers a wide range of topics within the broad area of optics, photonics, and optoelectronics, catering to researchers, academicians, professionals, practitioners, and students alike.
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