Design, Simulation and Fabrication of an Optimized Mass Sensor Based on Electromechanical Resonator for Molecules Detection and Measurement

Mass sensors based on MEMS resonators are widely used to detect and measure the amount of specific molecules. Also, electrostatic actuators are widely used to actuate resonators. The resonance frequency depends on the applied alternating voltage. Electrostatic capacitors can be used as sensing elements to record the mechanical resonance frequency. The mechanical displacement in the resonator changes the sensing element capacitance level proportional to the alternating voltage. In this work, actuators based on comb drive capacitors are optimized using high dielectric material. The proposed sensor can be fabricated in different scales, according to any application. The performance of the sensor and its quality are evaluated by finite element simulation. Also, the proposed sensor is fabricated and analyzed by experimental test to determine its mass sensitivity which is reported in the range of 0.01 ng.