Guangcan Zhou, Zi Heng Lim, Y. Qi, F. Chau, Guangya Zhou
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Abstract Grating plays an essential role in various optical systems owing to its unique dispersion properties. In recent years, there is increasing demand to miniaturize optical systems for a wide range of field applications. Therefore, the integration of diffraction grating with MEMS technology provides an efficient way to build truly miniaturized optical systems. Till now, MEMS diffraction gratings have mainly been explored in two directions, namely MEMS scanning gratings and MEMS tunable gratings. MEMS scanning gratings are constructed with a variety of MEMS actuators to drive a grating platform to scan across the target, and they play a significant role in various scanning systems. Meanwhile, the dispersive properties of grating scanners make them attractive in wavelength sensing applications, including spectrometers and hyperspectral imaging systems. Tunable gratings typically employ MEMS actuators to dynamically change the diffraction properties, thus tuning its wavelength sensitivity for a specific application. Thus, this review will introduce these two types of MEMS gratings in detail and evaluate their efficiency and advantages in various fields.
期刊介绍:
International Journal of Optomechatronics publishes the latest results of multidisciplinary research at the crossroads between optics, mechanics, fluidics and electronics.
Topics you can submit include, but are not limited to:
-Adaptive optics-
Optomechanics-
Machine vision, tracking and control-
Image-based micro-/nano- manipulation-
Control engineering for optomechatronics-
Optical metrology-
Optical sensors and light-based actuators-
Optomechatronics for astronomy and space applications-
Optical-based inspection and fault diagnosis-
Micro-/nano- optomechanical systems (MOEMS)-
Optofluidics-
Optical assembly and packaging-
Optical and vision-based manufacturing, processes, monitoring, and control-
Optomechatronics systems in bio- and medical technologies (such as optical coherence tomography (OCT) systems or endoscopes and optical based medical instruments)