单层石墨烯带在宽温度范围内的电学特性

IF 1.1 4区 材料科学 Q3 Engineering Materials Science-Poland Pub Date : 2023-07-04 DOI:10.5755/j02.ms.33700
Rachid Fates, R. Remmouche, T. Benkedidah
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引用次数: 1

摘要

本文提供了被定义为背栅石墨烯晶体管的单层石墨烯带器件的电学特性。两个终端背栅石墨烯带器件是在覆盖有90nm厚的热SiO2的传统Si衬底上制造的。石墨烯层的沉积采用化学气相沉积工艺,并用光学显微镜、扫描电子显微镜和拉曼光谱对其质量进行了检查。对于器件制造,通过掩模对电极图案使用光学光刻,并且通过热蒸发沉积Ti/Au(10nm/100nm)金属接触。我们报道了在77到300K的宽温度范围内的受控环境下对几种设备的低场和高场电学测量。在77K时,漏极电流减小,即石墨烯的电阻增加,并且非线性仍然存在。温度的最大影响在电荷中性点达到,我们观察到温度会影响电荷中性点的位置。这表明载流子被热激活,这随着背栅电压的增加产生最不明显的电流。
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Electrical Characteristics of Single Layer Graphene Ribbons in a Wide Temperature Range
This paper provides electrical characterization of single layer graphene ribbon devices defined as back-gated graphene transistors. The two-terminal back-gated graphene ribbon devices were fabricated on a conventional Si substrate covered by a 90 nm-thick thermal SiO2. The chemical vapor deposition process was used for the graphene layer deposition and its quality was checked with optical microscopy, scanning electron microscopy and Raman spectroscopy. For the device fabrication, optical lithography was used for electrode patterns through a mask, and Ti/Au (10 nm/100 nm) metallic contacts were deposited by thermal evaporation. We report low and high field electrical measurements of several devices, under a controlled environment over a wide temperature range, from 77 to 300 K. At 77 K, the drain current decreases, i.e. the resistance of the graphene increases, and the nonlinearity is still present. The maximum influence of the temperature is reached at the charges neutrality point, and we observe that the temperature could influence the position of the charge neutrality point. This indicates that the carriers are thermally activated, which yields a least pronounced current with the increase of the back gate voltage.
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来源期刊
Materials Science-Poland
Materials Science-Poland 工程技术-材料科学:综合
CiteScore
1.70
自引率
18.20%
发文量
0
审稿时长
6.2 months
期刊介绍: Material Sciences-Poland is an interdisciplinary journal devoted to experimental research into results on the relationships between structure, processing, properties, technology, and uses of materials. Original research articles and review can be only submitted.
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