一种基于多探测器背散射电子图像的通用地形重建方法

IF 1.8 3区材料科学 Q2 MATERIALS SCIENCE, CHARACTERIZATION & TESTING Strain Pub Date : 2022-05-29 DOI:10.1111/str.12416

J. Neggers, E. Héripré, M. Bonnet, S. Hallais, S. Roux

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引用次数: 0

摘要

从不同的探测器方向捕获的背散射电子(BSE)图像可以重建表面形貌。本文提出了一个非常通用的方法来解决这个问题，在光度立体方法的精神，允许任意的BSE探测器数量(至少3)和形状。总体思路是确定(非线性)模型参数并计算表面形貌，以便建模图像最好与获取的图像匹配。三个样品用于验证测量形貌与原子力显微镜(AFM)测量。均方根误差(RMS)在10-35 nm范围内，或样品总高度的1-1.5%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A generic topography reconstruction method based on multi‐detector backscattered electron images

Surface topographies can be reconstructed from backscattered electron (BSE) images captured from different detector orientations. This article presents a very general approach to this problem, in the spirit of photometric stereo methods, allowing for arbitrary BSE detector number (at least 3) and shapes. The general idea is to both determine the (non‐linear) model parameters and compute the surface topography so that the modelled images match at best the acquired ones. Three samples are used for validation of the measured topography with respect to atomic force microscopy (AFM) measurements. Root mean square (RMS) errors in the range of 10–35 nm, or 1–1.5% of total sampleheight, are obtained.

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来源期刊

Strain 工程技术-材料科学：表征与测试

CiteScore

4.10

自引率

4.80%

发文量

期刊介绍： Strain is an international journal that contains contributions from leading-edge research on the measurement of the mechanical behaviour of structures and systems. Strain only accepts contributions with sufficient novelty in the design, implementation, and/or validation of experimental methodologies to characterize materials, structures, and systems; i.e. contributions that are limited to the application of established methodologies are outside of the scope of the journal. The journal includes papers from all engineering disciplines that deal with material behaviour and degradation under load, structural design and measurement techniques. Although the thrust of the journal is experimental, numerical simulations and validation are included in the coverage. Strain welcomes papers that deal with novel work in the following areas: experimental techniques non-destructive evaluation techniques numerical analysis, simulation and validation residual stress measurement techniques design of composite structures and components impact behaviour of materials and structures signal and image processing transducer and sensor design structural health monitoring biomechanics extreme environment micro- and nano-scale testing method.