条纹偏转测量系统的非线性相位误差补偿

Lili Jiang, Xiaodong Zhang, F. Fang
{"title":"条纹偏转测量系统的非线性相位误差补偿","authors":"Lili Jiang, Xiaodong Zhang, F. Fang","doi":"10.1504/IJNM.2018.10012671","DOIUrl":null,"url":null,"abstract":"Fringe deflectometry technique (FDT) plays a more and more important role in specular surface measurement due to its large slope measurement range. However, its accuracy is heavily dependent on the quality of the extracted phase. The gamma effect of liquid crystal display (LCD) and CCD introduces significant phase distortion, resulting in a periodical phase error and measurement error. A mathematical model is established to illustrate phase error introduced by gamma effect, and an optimal algorithm based on four-time four-step phase-shifting (FFPS) is proposed to retrieve phase. Simulation results prove that FFPS phase retrieval method can compensate for the phase error caused by the nonlinearity of the LCD and CCD point-by-point, thus it is immune not only to calibration error, but also to the non-unitary of the gamma effect spatially and temporally. Experimental results are also presented to verify the performance of the proposed method.","PeriodicalId":14170,"journal":{"name":"International Journal of Nanomanufacturing","volume":"14 1","pages":"115"},"PeriodicalIF":0.0000,"publicationDate":"2018-05-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Nonlinear phase error compensation for fringe deflectometry measuring system\",\"authors\":\"Lili Jiang, Xiaodong Zhang, F. Fang\",\"doi\":\"10.1504/IJNM.2018.10012671\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Fringe deflectometry technique (FDT) plays a more and more important role in specular surface measurement due to its large slope measurement range. However, its accuracy is heavily dependent on the quality of the extracted phase. The gamma effect of liquid crystal display (LCD) and CCD introduces significant phase distortion, resulting in a periodical phase error and measurement error. A mathematical model is established to illustrate phase error introduced by gamma effect, and an optimal algorithm based on four-time four-step phase-shifting (FFPS) is proposed to retrieve phase. Simulation results prove that FFPS phase retrieval method can compensate for the phase error caused by the nonlinearity of the LCD and CCD point-by-point, thus it is immune not only to calibration error, but also to the non-unitary of the gamma effect spatially and temporally. Experimental results are also presented to verify the performance of the proposed method.\",\"PeriodicalId\":14170,\"journal\":{\"name\":\"International Journal of Nanomanufacturing\",\"volume\":\"14 1\",\"pages\":\"115\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-05-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Nanomanufacturing\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1504/IJNM.2018.10012671\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"Engineering\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Nanomanufacturing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1504/IJNM.2018.10012671","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"Engineering","Score":null,"Total":0}
引用次数: 1

摘要

边缘偏折法(FDT)由于其较大的斜率测量范围,在镜面测量中发挥着越来越重要的作用。然而,它的准确性在很大程度上取决于提取的相位的质量。液晶显示器(LCD)和CCD的伽马效应引入了显著的相位失真,导致周期性的相位误差和测量误差。建立了一个数学模型来说明伽马效应引入的相位误差,并提出了一种基于四次四步相移(FFPS)的相位恢复优化算法。仿真结果表明,FFPS相位恢复方法可以逐点补偿LCD和CCD非线性引起的相位误差,不仅不受校准误差的影响,而且在空间和时间上不受伽马效应的非酉性影响。实验结果也验证了该方法的性能。
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Nonlinear phase error compensation for fringe deflectometry measuring system
Fringe deflectometry technique (FDT) plays a more and more important role in specular surface measurement due to its large slope measurement range. However, its accuracy is heavily dependent on the quality of the extracted phase. The gamma effect of liquid crystal display (LCD) and CCD introduces significant phase distortion, resulting in a periodical phase error and measurement error. A mathematical model is established to illustrate phase error introduced by gamma effect, and an optimal algorithm based on four-time four-step phase-shifting (FFPS) is proposed to retrieve phase. Simulation results prove that FFPS phase retrieval method can compensate for the phase error caused by the nonlinearity of the LCD and CCD point-by-point, thus it is immune not only to calibration error, but also to the non-unitary of the gamma effect spatially and temporally. Experimental results are also presented to verify the performance of the proposed method.
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来源期刊
International Journal of Nanomanufacturing
International Journal of Nanomanufacturing Engineering-Industrial and Manufacturing Engineering
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