低浓度氨的传感器检测特性研究

IF 0.5 4区物理与天体物理 Q4 PHYSICS, MULTIDISCIPLINARY Journal of Contemporary Physics (Armenian Academy of Sciences) Pub Date : 2021-12-19 DOI:10.3103/S1068337221040034

M. S. Aleksanyan, A. G. Sayunts, G. H. Shahkhatuni, V. M. Aroutiounian, G. E. Shahnazaryan

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引用次数: 4

摘要

本文研究了Fe2O3:ZnO (60: 40 mol %)薄膜在不同工作温度下的形貌和对氨蒸汽的气敏特性。对Fe2O3:ZnO敏感膜表面的SEM研究表明，薄膜的晶粒尺寸约为50 nm。该传感器对200°C开始的氨蒸汽敏感，工作温度选择为250°C。基于Fe2O3:ZnO的传感器的低检测限很低(~14 ppm)，在此浓度的氨蒸气下，传感器的电阻变化超过1.5倍。基于Fe2O3: zno的传感器的增强参数将允许在氨检测设备中使用这种结构。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Study of Characteristics of the Sensor Detecting of Low Concentration of Ammonia

In this work, the morphology of Fe₂O₃:ZnO (60 : 40 mol %) film and gas sensing characteristics to ammonia vapors at different operating temperatures were investigated. The SEM investigation of the surface of the sensitive film of Fe₂O₃:ZnO showed that the grain size in the film was about 50 nm. The sensor showed sensitivity to ammonia vapors starting at 200°C and the operating temperature was chosen as 250°C. The low detection limit of the sensor based on Fe₂O₃:ZnO is quite low (~14 ppm) and at this concentration of ammonia vapors the resistance of the sensor changed more than 1.5 times. The enhanced parameters of the Fe₂O₃:ZnO-based sensor will allow using this structure in ammonia detecting devices.

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来源期刊

Journal of Contemporary Physics (Armenian Academy of Sciences) PHYSICS, MULTIDISCIPLINARY-

CiteScore

1.00

自引率

66.70%

发文量

审稿时长

6-12 weeks

期刊介绍： Journal of Contemporary Physics (Armenian Academy of Sciences) is a journal that covers all fields of modern physics. It publishes significant contributions in such areas of theoretical and applied science as interaction of elementary particles at superhigh energies, elementary particle physics, charged particle interactions with matter, physics of semiconductors and semiconductor devices, physics of condensed matter, radiophysics and radioelectronics, optics and quantum electronics, quantum size effects, nanophysics, sensorics, and superconductivity.