用于生物医学成像的扩展焦深硒化锌微透镜阵列的光学设计与制造

IF 3.3 Q3 NANOSCIENCE & NANOTECHNOLOGY Nanofabrication Pub Date : 2023-02-08 DOI:10.37819/nanofab.008.293
Neha Khatri, S. Berwal, K. Manjunath, Bharpoor Singh
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引用次数: 1

摘要

光学相干断层扫描是一种众所周知的生物组织光学成像技术。然而,高分辨率光学相干层析成像的深度扫描范围受到其聚焦深度的限制。在本研究中,采用硒化锌(ZnSe)微透镜阵列(MLA)来克服光学相干断层扫描的焦深限制。具有低阿贝数和高色散的ZnSe材料以横向分辨率扩展了焦深。ZnSe-MLA将入射光(从可见光到近红外(NIR)区域)聚焦在多个焦平面上,光在生物组织上均匀分布。MLA使用Zemax OpticStudio软件设计,并通过基于慢工具伺服(STS)配置的单点金刚石车削制造。STS机加工具有独特的优点,即无需额外的行李即可提供更大的自由度,从而减少设置时间。实验结果表明,STS加工工艺在制备ZnSe MLA方面具有良好的精度。使用相干相关干涉术(CCI)对制造的MLA进行表征,描绘了没有结构和位置失真的均匀小透镜,总误差在公差限度内为32nm。
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Optical design and fabrication of zinc selenide microlens array with extended depth of focus for biomedical imaging
Optical coherence tomography is a well-known technique for the optical imaging biological tissues. However, the depth scanning range of high-resolution optical coherence tomography is restricted by its depth of focus. In this study, a Zinc Selenide (ZnSe) Microlens Array (MLA) is employed to overcome the depth-of-focus limitation of optical coherence tomography. The ZnSe material with a low Abbe number and high chromatic dispersion extends the depth of focus with transverse resolution. The ZnSe MLA focused the incident light (from visible to near-infrared (NIR) region) on multiple focal planes with the uniform distribution of light over a biological tissue. The MLA is designed using Zemax OpticStudio software and fabricated via a single-point diamond-turning based on Slow Tool Servo (STS) configuration. STS machining has the unique advantage of offering larger degrees of freedom with no additional baggage, thereby reducing the setup time. The experimental results show the effectiveness of the STS machining process in fabricating ZnSe MLA with desired accuracies. The characterization of fabricated MLA using Coherence Correlation Interferometry (CCI) depicts uniform lenslets with no structural and positional distortion, with a total error of 32 nm within the tolerance limit.
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来源期刊
Nanofabrication
Nanofabrication NANOSCIENCE & NANOTECHNOLOGY-
自引率
10.30%
发文量
13
审稿时长
16 weeks
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