MEMS传感器在设备状态监测中的应用:关于诊断特征准确性的讨论

G. D'Emilia, E. Natale
{"title":"MEMS传感器在设备状态监测中的应用:关于诊断特征准确性的讨论","authors":"G. D'Emilia, E. Natale","doi":"10.1051/IJMQE/2021011","DOIUrl":null,"url":null,"abstract":"This paper analyses the effect of the variability of metrological characteristics of a set of low-cost Micro Electro-Mechanical Systems (MEMS) for the acceleration measurement, on the calculation of typical features used for condition monitoring (CM) of automatic production lines. The knowledge of the contribution of the variability of metrological characteristics to the final accuracy of features is an aspect of interest when networks of low-cost sensors are used, in particular in case the variability of their characteristics is high. In fact, due to a mass production, the calibration is not carried out sensor by sensor, but the characteristics are determined on a sample basis and assigned to the entire batch. Neglecting the variability between sensors can lead to effects on the results of data analysis, which are not easily predictable. In this paper, the real variability of the sensor's characteristics, experimentally evaluated through the calibration of a set of 25 low-cost MEMS accelerometers, has been taken into account. Digital sensitivity, signal-to-noise ratio and data rate variability of each device have been considered for the analysis. The analysis has been carried out with reference to two different test cases of industrial interest, by modifying the real outputs of high performance piezoelectric accelerometers used for CM, in order to simulate the effect of the metrological characteristics of MEMS sensors. The results show which features, among those typically used for CM, are more affected and which characteristics of MEMS are more influencing the features themselves, with reference to the specific considered applications.","PeriodicalId":38371,"journal":{"name":"International Journal of Metrology and Quality Engineering","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2021-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Use of MEMS sensors for condition monitoring of devices: discussion about the accuracy of features for diagnosis\",\"authors\":\"G. D'Emilia, E. Natale\",\"doi\":\"10.1051/IJMQE/2021011\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper analyses the effect of the variability of metrological characteristics of a set of low-cost Micro Electro-Mechanical Systems (MEMS) for the acceleration measurement, on the calculation of typical features used for condition monitoring (CM) of automatic production lines. The knowledge of the contribution of the variability of metrological characteristics to the final accuracy of features is an aspect of interest when networks of low-cost sensors are used, in particular in case the variability of their characteristics is high. In fact, due to a mass production, the calibration is not carried out sensor by sensor, but the characteristics are determined on a sample basis and assigned to the entire batch. Neglecting the variability between sensors can lead to effects on the results of data analysis, which are not easily predictable. In this paper, the real variability of the sensor's characteristics, experimentally evaluated through the calibration of a set of 25 low-cost MEMS accelerometers, has been taken into account. Digital sensitivity, signal-to-noise ratio and data rate variability of each device have been considered for the analysis. The analysis has been carried out with reference to two different test cases of industrial interest, by modifying the real outputs of high performance piezoelectric accelerometers used for CM, in order to simulate the effect of the metrological characteristics of MEMS sensors. The results show which features, among those typically used for CM, are more affected and which characteristics of MEMS are more influencing the features themselves, with reference to the specific considered applications.\",\"PeriodicalId\":38371,\"journal\":{\"name\":\"International Journal of Metrology and Quality Engineering\",\"volume\":\"1 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Metrology and Quality Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1051/IJMQE/2021011\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"Engineering\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Metrology and Quality Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1051/IJMQE/2021011","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"Engineering","Score":null,"Total":0}
引用次数: 1

摘要

本文分析了一套用于加速度测量的低成本微机电系统(MEMS)测量特性的可变性对自动生产线状态监测(CM)典型特征计算的影响。当使用低成本传感器网络时,特别是在其特性的可变性很高的情况下,了解计量特性的可变性对特征的最终精度的贡献是一个感兴趣的方面。事实上,由于大规模生产,校准不是逐个传感器进行的,而是在样品基础上确定特性并分配给整个批次。忽略传感器之间的可变性会导致对数据分析结果的影响,这是不容易预测的。本文考虑了传感器特性的真实可变性,通过对一组25个低成本MEMS加速度计的校准进行了实验评估。分析中考虑了每个器件的数字灵敏度、信噪比和数据速率变异性。通过修改用于CM的高性能压电加速度计的实际输出,参考两个不同的工业测试案例进行了分析,以模拟MEMS传感器的计量特性的影响。结果表明,参考具体考虑的应用,在CM通常使用的特征中,哪些特征受到的影响更大,MEMS的哪些特征对特征本身的影响更大。
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Use of MEMS sensors for condition monitoring of devices: discussion about the accuracy of features for diagnosis
This paper analyses the effect of the variability of metrological characteristics of a set of low-cost Micro Electro-Mechanical Systems (MEMS) for the acceleration measurement, on the calculation of typical features used for condition monitoring (CM) of automatic production lines. The knowledge of the contribution of the variability of metrological characteristics to the final accuracy of features is an aspect of interest when networks of low-cost sensors are used, in particular in case the variability of their characteristics is high. In fact, due to a mass production, the calibration is not carried out sensor by sensor, but the characteristics are determined on a sample basis and assigned to the entire batch. Neglecting the variability between sensors can lead to effects on the results of data analysis, which are not easily predictable. In this paper, the real variability of the sensor's characteristics, experimentally evaluated through the calibration of a set of 25 low-cost MEMS accelerometers, has been taken into account. Digital sensitivity, signal-to-noise ratio and data rate variability of each device have been considered for the analysis. The analysis has been carried out with reference to two different test cases of industrial interest, by modifying the real outputs of high performance piezoelectric accelerometers used for CM, in order to simulate the effect of the metrological characteristics of MEMS sensors. The results show which features, among those typically used for CM, are more affected and which characteristics of MEMS are more influencing the features themselves, with reference to the specific considered applications.
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来源期刊
International Journal of Metrology and Quality Engineering
International Journal of Metrology and Quality Engineering Engineering-Safety, Risk, Reliability and Quality
CiteScore
1.70
自引率
0.00%
发文量
8
审稿时长
8 weeks
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