纳米定位阶段具有可学习带扩展的迭代学习控制

IF 1.9 4区 计算机科学 Q3 AUTOMATION & CONTROL SYSTEMS Assembly Automation Pub Date : 2022-09-14 DOI:10.1108/aa-03-2022-0070
Chengsi Huang, Zhi-Heng Yang, Jiedong Li
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引用次数: 0

摘要

摘要压电驱动纳米定位平台具有响应速度快、定位精度高、刚度大等优点,在微纳加工领域得到了广泛的应用。然而,由于压电作动器固有的非线性滞后,使得纳米定位平台的定位精度大大降低。此外,在应用中,纳米定位阶段总是以重复轨迹作为参考信号进行,这使得磁滞行为具有周期性。为此,提出了一种自适应谐振抑制迭代学习控制(ARS-ILC)来解决磁滞效应。从而提高了纳米定位平台的定位精度。设计/方法/方法迟滞行为由Prandtl-Ishlinskii模型确定。通过建立收敛函数,证明了ILC的可学习频带受到纳米定位阶段轻阻尼共振的限制。然后,采用约束极点和零点的自适应陷波滤波器(ANF)抑制谐振峰;最后,采用在线稳定性监督(OSS)保证估计频率收敛于谐振频率。在纳米定位阶段进行了一系列实验,结果验证了OSS可以保证ANF的收敛性。此外,通过ARS-ILC扩展了可学习频带;因此,纳米定位阶段的迟滞行为被取消。由于ARS-ILC精度高,易于实现,不仅可以用于纳米定位阶段控制,还可以用于其他重复性运动的制造过程控制。
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An iterative learning control with learnable band extension for the nanopositioning stage
Purpose Due to the advantages of fast response, high positioning precision and large stiffness, the piezoelectric-actuated nanopositioning stage is widely used in the micro/nanomachining fields. However, due to the inherent nonlinear hysteresis of the piezoelectric-actuator, the positioning accuracy of nanopositioning stage is greatly degraded. Besides, the nanopositioning stage is always performed with repetitive trajectories as the reference signals in applications, which makes the hysteresis behavior periodic. To this end, an adaptive resonance suppression iterative learning control (ARS-ILC) is proposed to address the hysteresis effect. With this effort, the positioning accuracy of the nanopositioning stage is improved. Design/methodology/approach The hysteresis behavior is identified by the Prandtl–Ishlinskii model. By establishing a convergence function, it is demonstrated that the learnable band of ILC is restricted by the lightly damping resonance of nanopositioning stage. Then, an adaptive notch filter (ANF) with constrained poles and zeros is adopted to suppress the resonant peak. Finally, online stability supervision (OSS) is used to ensure that the estimated frequency converges to the resonant frequency. Findings A series of experiments were carried out in the nanopositioning stage, and the results validated that the OSS is available to ensure the convergence of the ANF. Furthermore, the learnable band was extended via ARS-ILC; thus, the hysteresis behavior of nanopositioning stage has been canceled. Originality/value Due to high accuracy and easy implementation, the ARS-ILC can be used in not only nanopositioning stage control but other fabrication process control with repetitive motion.
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来源期刊
Assembly Automation
Assembly Automation 工程技术-工程:制造
CiteScore
4.30
自引率
14.30%
发文量
51
审稿时长
3.3 months
期刊介绍: Assembly Automation publishes peer reviewed research articles, technology reviews and specially commissioned case studies. Each issue includes high quality content covering all aspects of assembly technology and automation, and reflecting the most interesting and strategically important research and development activities from around the world. Because of this, readers can stay at the very forefront of industry developments. All research articles undergo rigorous double-blind peer review, and the journal’s policy of not publishing work that has only been tested in simulation means that only the very best and most practical research articles are included. This ensures that the material that is published has real relevance and value for commercial manufacturing and research organizations.
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