{"title":"纳米定位阶段具有可学习带扩展的迭代学习控制","authors":"Chengsi Huang, Zhi-Heng Yang, Jiedong Li","doi":"10.1108/aa-03-2022-0070","DOIUrl":null,"url":null,"abstract":"Purpose Due to the advantages of fast response, high positioning precision and large stiffness, the piezoelectric-actuated nanopositioning stage is widely used in the micro/nanomachining fields. However, due to the inherent nonlinear hysteresis of the piezoelectric-actuator, the positioning accuracy of nanopositioning stage is greatly degraded. Besides, the nanopositioning stage is always performed with repetitive trajectories as the reference signals in applications, which makes the hysteresis behavior periodic. To this end, an adaptive resonance suppression iterative learning control (ARS-ILC) is proposed to address the hysteresis effect. With this effort, the positioning accuracy of the nanopositioning stage is improved. Design/methodology/approach The hysteresis behavior is identified by the Prandtl–Ishlinskii model. By establishing a convergence function, it is demonstrated that the learnable band of ILC is restricted by the lightly damping resonance of nanopositioning stage. Then, an adaptive notch filter (ANF) with constrained poles and zeros is adopted to suppress the resonant peak. Finally, online stability supervision (OSS) is used to ensure that the estimated frequency converges to the resonant frequency. Findings A series of experiments were carried out in the nanopositioning stage, and the results validated that the OSS is available to ensure the convergence of the ANF. Furthermore, the learnable band was extended via ARS-ILC; thus, the hysteresis behavior of nanopositioning stage has been canceled. Originality/value Due to high accuracy and easy implementation, the ARS-ILC can be used in not only nanopositioning stage control but other fabrication process control with repetitive motion.","PeriodicalId":55448,"journal":{"name":"Assembly Automation","volume":null,"pages":null},"PeriodicalIF":1.9000,"publicationDate":"2022-09-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"An iterative learning control with learnable band extension for the nanopositioning stage\",\"authors\":\"Chengsi Huang, Zhi-Heng Yang, Jiedong Li\",\"doi\":\"10.1108/aa-03-2022-0070\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Purpose Due to the advantages of fast response, high positioning precision and large stiffness, the piezoelectric-actuated nanopositioning stage is widely used in the micro/nanomachining fields. However, due to the inherent nonlinear hysteresis of the piezoelectric-actuator, the positioning accuracy of nanopositioning stage is greatly degraded. Besides, the nanopositioning stage is always performed with repetitive trajectories as the reference signals in applications, which makes the hysteresis behavior periodic. To this end, an adaptive resonance suppression iterative learning control (ARS-ILC) is proposed to address the hysteresis effect. With this effort, the positioning accuracy of the nanopositioning stage is improved. Design/methodology/approach The hysteresis behavior is identified by the Prandtl–Ishlinskii model. By establishing a convergence function, it is demonstrated that the learnable band of ILC is restricted by the lightly damping resonance of nanopositioning stage. Then, an adaptive notch filter (ANF) with constrained poles and zeros is adopted to suppress the resonant peak. Finally, online stability supervision (OSS) is used to ensure that the estimated frequency converges to the resonant frequency. Findings A series of experiments were carried out in the nanopositioning stage, and the results validated that the OSS is available to ensure the convergence of the ANF. Furthermore, the learnable band was extended via ARS-ILC; thus, the hysteresis behavior of nanopositioning stage has been canceled. Originality/value Due to high accuracy and easy implementation, the ARS-ILC can be used in not only nanopositioning stage control but other fabrication process control with repetitive motion.\",\"PeriodicalId\":55448,\"journal\":{\"name\":\"Assembly Automation\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.9000,\"publicationDate\":\"2022-09-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Assembly Automation\",\"FirstCategoryId\":\"94\",\"ListUrlMain\":\"https://doi.org/10.1108/aa-03-2022-0070\",\"RegionNum\":4,\"RegionCategory\":\"计算机科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"AUTOMATION & CONTROL SYSTEMS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Assembly Automation","FirstCategoryId":"94","ListUrlMain":"https://doi.org/10.1108/aa-03-2022-0070","RegionNum":4,"RegionCategory":"计算机科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"AUTOMATION & CONTROL SYSTEMS","Score":null,"Total":0}
An iterative learning control with learnable band extension for the nanopositioning stage
Purpose Due to the advantages of fast response, high positioning precision and large stiffness, the piezoelectric-actuated nanopositioning stage is widely used in the micro/nanomachining fields. However, due to the inherent nonlinear hysteresis of the piezoelectric-actuator, the positioning accuracy of nanopositioning stage is greatly degraded. Besides, the nanopositioning stage is always performed with repetitive trajectories as the reference signals in applications, which makes the hysteresis behavior periodic. To this end, an adaptive resonance suppression iterative learning control (ARS-ILC) is proposed to address the hysteresis effect. With this effort, the positioning accuracy of the nanopositioning stage is improved. Design/methodology/approach The hysteresis behavior is identified by the Prandtl–Ishlinskii model. By establishing a convergence function, it is demonstrated that the learnable band of ILC is restricted by the lightly damping resonance of nanopositioning stage. Then, an adaptive notch filter (ANF) with constrained poles and zeros is adopted to suppress the resonant peak. Finally, online stability supervision (OSS) is used to ensure that the estimated frequency converges to the resonant frequency. Findings A series of experiments were carried out in the nanopositioning stage, and the results validated that the OSS is available to ensure the convergence of the ANF. Furthermore, the learnable band was extended via ARS-ILC; thus, the hysteresis behavior of nanopositioning stage has been canceled. Originality/value Due to high accuracy and easy implementation, the ARS-ILC can be used in not only nanopositioning stage control but other fabrication process control with repetitive motion.
期刊介绍:
Assembly Automation publishes peer reviewed research articles, technology reviews and specially commissioned case studies. Each issue includes high quality content covering all aspects of assembly technology and automation, and reflecting the most interesting and strategically important research and development activities from around the world. Because of this, readers can stay at the very forefront of industry developments.
All research articles undergo rigorous double-blind peer review, and the journal’s policy of not publishing work that has only been tested in simulation means that only the very best and most practical research articles are included. This ensures that the material that is published has real relevance and value for commercial manufacturing and research organizations.