传感器用薄石英纤维表面不同形貌的氧化锡涂层

IF 0.4 4区 工程技术 Q4 ENGINEERING, MULTIDISCIPLINARY Instruments and Experimental Techniques Pub Date : 2023-09-14 DOI:10.1134/S0020441223050226
D. P. Sudas, P. I. Kuznetsov
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引用次数: 0

摘要

在单模石英光纤的化学变薄截面表面获得了氧化锡薄膜涂层,并进行了实验表征。采用金属有机化学气相沉积法(MOCVD)在纤维表面合成了该材料。为了改变表面形貌,我们用载气(干燥空气)提供不同量的四甲基锡(SnMe4)到沉积区,通过改变起泡器的温度和试剂。在沉积过程中,实时记录光路的透射光谱,实验中起泡器的温度在-20 ~ +20°С之间变化。在扫描电子显微镜下研究了沉积膜的表面,测试了沉积膜对硫酸水溶液的耐化学性,并评估了损耗模式共振(LMR)对环境折射率在1.35 ~ 1.41范围内变化的灵敏度。在较高的试剂流速下制备的样品对一阶TM组分的共振灵敏度为3800 nm/折射率单位(RIU),但与低试剂用量制备的涂层相比,这种涂层在浓硫酸溶液中明显溶解。
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Tin (IV) Oxide Coatings with Different Morphologies on the Surface of a Thinned Quartz Fiber for Sensor Application

Thin-film coatings of tin oxide on the surface of a chemically thinned section of a single-mode quartz fiber have been obtained and experimentally characterized. The materials were synthesized on the fiber surface by metal-organic chemical vapor deposition (MOCVD). To change the surface morphology, we used different amounts of tetramethyltin (SnMe4) supplied by a carrier gas (dried air) to the deposition zone by varying the temperature of the bubbler with the reagent. During deposition, the transmission spectrum of the optical path was recorded in real time, and the temperature of the bubbler in the experiments varied from –20 to +20°С. After studying the surface on a scanning electron microscope, the deposited films were tested for chemical resistance to an aqueous solution of sulfuric acid and the sensitivity of the lossy mode resonance (LMR) to changes in the refractive index of the environment in the range from 1.35 to 1.41 was evaluated. Samples produced at higher reagent flow rates exhibited a greater resonance sensitivity of 3800 nm/refractive index unit (RIU) for the first-order TM component of the resonance, but such coatings dissolve noticeably in concentrated sulfuric acid solutions, in contrast to coatings obtained with low reagent consumption.

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来源期刊
Instruments and Experimental Techniques
Instruments and Experimental Techniques 工程技术-工程:综合
CiteScore
1.20
自引率
33.30%
发文量
113
审稿时长
4-8 weeks
期刊介绍: Instruments and Experimental Techniques is an international peer reviewed journal that publishes reviews describing advanced methods for physical measurements and techniques and original articles that present techniques for physical measurements, principles of operation, design, methods of application, and analysis of the operation of physical instruments used in all fields of experimental physics and when conducting measurements using physical methods and instruments in astronomy, natural sciences, chemistry, biology, medicine, and ecology.
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