{"title":"用原子配位取代法合成碳化硅外延层的热力学、动力学和技术及其独特的性质。回顾","authors":"S. Kukushkin, A. Osipov","doi":"10.17308/kcmf.2022.24/10549","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":52328,"journal":{"name":"Kondensirovannye Sredy Mezhfaznye Granitsy","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Thermodynamics, kinetics, and technology of synthesis of epitaxial layers of silicon carbide on silicon by coordinated substitution of atoms, and its unique properties. A review\",\"authors\":\"S. Kukushkin, A. Osipov\",\"doi\":\"10.17308/kcmf.2022.24/10549\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":52328,\"journal\":{\"name\":\"Kondensirovannye Sredy Mezhfaznye Granitsy\",\"volume\":\"1 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Kondensirovannye Sredy Mezhfaznye Granitsy\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.17308/kcmf.2022.24/10549\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"Materials Science\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Kondensirovannye Sredy Mezhfaznye Granitsy","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.17308/kcmf.2022.24/10549","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Materials Science","Score":null,"Total":0}
Thermodynamics, kinetics, and technology of synthesis of epitaxial layers of silicon carbide on silicon by coordinated substitution of atoms, and its unique properties. A review