Dinesh Kumar Parasuraman, A. Arnoldus, Maria Kemps
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Prediction Model for Particle Fallout in Cleanrooms
Particle fallout in cleanrooms is a primary concern for industries manufacturing super critical products with surfaces highly susceptible to particulate contamination. Limited research has been conducted to predict the contribution of particulate contamination by production activities in cleanrooms. This paper describes a prediction model that utilizes the relationship between airborne particulate contamination and particle fallout, and the relationship between particle fallout and spatial variations, to predict the level of particle fallout on product surfaces in the cleanroom. Experimental modeling and statistical process control techniques were employed in establishing the above relationships and validation was performed by comparing the predictions from the model with actual observations at production cleanrooms.
期刊介绍:
The Journal of the IEST is an official publication of the Institute of Environmental Sciences and Technology and is of archival quality and noncommercial in nature. It was established to advance knowledge through technical articles selected by peer review, and has been published for over 50 years as a benefit to IEST members and the technical community at large as as a permanent record of progress in the science and technology of the environmental sciences