洁净室粒子沉降预测模型

Q4 Engineering Journal of the IEST Pub Date : 2012-10-29 DOI:10.17764/JIET.55.1.2441H544M128474K
Dinesh Kumar Parasuraman, A. Arnoldus, Maria Kemps
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引用次数: 7

摘要

对于制造表面极易受到颗粒污染的超临界产品的工业来说,洁净室中的粒子沉降是一个主要问题。已经进行了有限的研究来预测洁净室中生产活动对颗粒物污染的贡献。本文描述了一个利用空气中颗粒污染与颗粒沉降的关系以及颗粒沉降与空间变化的关系来预测洁净室产品表面颗粒沉降水平的预测模型。采用实验建模和统计过程控制技术建立上述关系,并将模型预测结果与生产洁净室实际观察结果进行对比验证。
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Prediction Model for Particle Fallout in Cleanrooms
Particle fallout in cleanrooms is a primary concern for industries manufacturing super critical products with surfaces highly susceptible to particulate contamination. Limited research has been conducted to predict the contribution of particulate contamination by production activities in cleanrooms. This paper describes a prediction model that utilizes the relationship between airborne particulate contamination and particle fallout, and the relationship between particle fallout and spatial variations, to predict the level of particle fallout on product surfaces in the cleanroom. Experimental modeling and statistical process control techniques were employed in establishing the above relationships and validation was performed by comparing the predictions from the model with actual observations at production cleanrooms.
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来源期刊
Journal of the IEST
Journal of the IEST Engineering-Safety, Risk, Reliability and Quality
CiteScore
0.40
自引率
0.00%
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0
期刊介绍: The Journal of the IEST is an official publication of the Institute of Environmental Sciences and Technology and is of archival quality and noncommercial in nature. It was established to advance knowledge through technical articles selected by peer review, and has been published for over 50 years as a benefit to IEST members and the technical community at large as as a permanent record of progress in the science and technology of the environmental sciences
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