{"title":"案例研究:德雷柏实验室微细加工中心的设计与建造","authors":"R. Morrison, L. Racz, D. J. Carter","doi":"10.17764/JIET.56.1.T755M81670245652","DOIUrl":null,"url":null,"abstract":"For 25 years, Draper Laboratory has been active in the areas of microelectromechanical systems (MEMS) and multichip modules (MCM), using two separate laboratories. When these laboratories were constructed, cleanroom technology was in its mid-life cycle. To meet evolving R&D needs, the cleanroom facilities recently underwent a major renovation as described in this article.","PeriodicalId":35935,"journal":{"name":"Journal of the IEST","volume":"56 1","pages":"3-16"},"PeriodicalIF":0.0000,"publicationDate":"2013-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Case Study: Design and Construction of the Draper Laboratory Microfabrication Center\",\"authors\":\"R. Morrison, L. Racz, D. J. Carter\",\"doi\":\"10.17764/JIET.56.1.T755M81670245652\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"For 25 years, Draper Laboratory has been active in the areas of microelectromechanical systems (MEMS) and multichip modules (MCM), using two separate laboratories. When these laboratories were constructed, cleanroom technology was in its mid-life cycle. To meet evolving R&D needs, the cleanroom facilities recently underwent a major renovation as described in this article.\",\"PeriodicalId\":35935,\"journal\":{\"name\":\"Journal of the IEST\",\"volume\":\"56 1\",\"pages\":\"3-16\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-03-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of the IEST\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.17764/JIET.56.1.T755M81670245652\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"Engineering\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the IEST","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.17764/JIET.56.1.T755M81670245652","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Engineering","Score":null,"Total":0}
Case Study: Design and Construction of the Draper Laboratory Microfabrication Center
For 25 years, Draper Laboratory has been active in the areas of microelectromechanical systems (MEMS) and multichip modules (MCM), using two separate laboratories. When these laboratories were constructed, cleanroom technology was in its mid-life cycle. To meet evolving R&D needs, the cleanroom facilities recently underwent a major renovation as described in this article.
期刊介绍：
The Journal of the IEST is an official publication of the Institute of Environmental Sciences and Technology and is of archival quality and noncommercial in nature. It was established to advance knowledge through technical articles selected by peer review, and has been published for over 50 years as a benefit to IEST members and the technical community at large as as a permanent record of progress in the science and technology of the environmental sciences
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