{"title":"Fe-Ti-M（M=Al，Si，Co）三元薄膜的结构与软磁性能","authors":"N. Aoyama;F. Sato;Y. Fujino;T. Miyazaki","doi":"10.1109/TJMJ.1994.4565900","DOIUrl":null,"url":null,"abstract":"The magnetic and structural properties of sputtered Fe-Al-Ti, Fe-Si-Ti and Fe-Co-Ti ternary films were investigated. Samples were annealed at 673K for one hour. Crystal structures were bcc for the Fe-Si-Ti and Fe-Co-Ti ternary films, and a mixture of bcc and bcc+Fe\n<sub>2</sub>\nTi for the Fe-Al-Ti ternary films. The addition of Ti reduces &3x001F5;rain sizes to a minimum of about 10 nm. Addition of Al, Si or Ti to Fe reduces the saturation magnetic flux density of Fe-Al-Ti and Fe-Si-Ti films, and addition of Co increases the saturation magnetic flux density of Fe-Co-Ti. Zero-magnetostriction samples were obtained in each ternary system. Low coercivity (under 5 Oe) and high initial permeability (about 1000) were obtained together with zero magnetostriction for Fe-Al-Ti ternary films by adding a small amount of Ti. In the case of Fe-Co-Ti ternary films, low coercivity and high permeability were obtained along with small grain sizes of 10 nm or so. Films with low magnetostriction (λ\n<sub>s</sub>\n≪3×10\n<sup>-6</sup>\n) had a coercivity roughly proportional to the third power of the grain diameter.","PeriodicalId":100647,"journal":{"name":"IEEE Translation Journal on Magnetics in Japan","volume":"9 4","pages":"107-113"},"PeriodicalIF":0.0000,"publicationDate":"1994-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1109/TJMJ.1994.4565900","citationCount":"1","resultStr":"{\"title\":\"Structure and Soft Magnetic Properties of Fe-Ti-M (M=Al,Si,Co) Ternary Films\",\"authors\":\"N. Aoyama;F. Sato;Y. Fujino;T. Miyazaki\",\"doi\":\"10.1109/TJMJ.1994.4565900\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The magnetic and structural properties of sputtered Fe-Al-Ti, Fe-Si-Ti and Fe-Co-Ti ternary films were investigated. Samples were annealed at 673K for one hour. Crystal structures were bcc for the Fe-Si-Ti and Fe-Co-Ti ternary films, and a mixture of bcc and bcc+Fe\\n<sub>2</sub>\\nTi for the Fe-Al-Ti ternary films. The addition of Ti reduces &3x001F5;rain sizes to a minimum of about 10 nm. Addition of Al, Si or Ti to Fe reduces the saturation magnetic flux density of Fe-Al-Ti and Fe-Si-Ti films, and addition of Co increases the saturation magnetic flux density of Fe-Co-Ti. Zero-magnetostriction samples were obtained in each ternary system. Low coercivity (under 5 Oe) and high initial permeability (about 1000) were obtained together with zero magnetostriction for Fe-Al-Ti ternary films by adding a small amount of Ti. In the case of Fe-Co-Ti ternary films, low coercivity and high permeability were obtained along with small grain sizes of 10 nm or so. Films with low magnetostriction (λ\\n<sub>s</sub>\\n≪3×10\\n<sup>-6</sup>\\n) had a coercivity roughly proportional to the third power of the grain diameter.\",\"PeriodicalId\":100647,\"journal\":{\"name\":\"IEEE Translation Journal on Magnetics in Japan\",\"volume\":\"9 4\",\"pages\":\"107-113\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1109/TJMJ.1994.4565900\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Translation Journal on Magnetics in Japan\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/4565900/\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Translation Journal on Magnetics in Japan","FirstCategoryId":"1085","ListUrlMain":"https://ieeexplore.ieee.org/document/4565900/","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Structure and Soft Magnetic Properties of Fe-Ti-M (M=Al,Si,Co) Ternary Films
The magnetic and structural properties of sputtered Fe-Al-Ti, Fe-Si-Ti and Fe-Co-Ti ternary films were investigated. Samples were annealed at 673K for one hour. Crystal structures were bcc for the Fe-Si-Ti and Fe-Co-Ti ternary films, and a mixture of bcc and bcc+Fe
2
Ti for the Fe-Al-Ti ternary films. The addition of Ti reduces &3x001F5;rain sizes to a minimum of about 10 nm. Addition of Al, Si or Ti to Fe reduces the saturation magnetic flux density of Fe-Al-Ti and Fe-Si-Ti films, and addition of Co increases the saturation magnetic flux density of Fe-Co-Ti. Zero-magnetostriction samples were obtained in each ternary system. Low coercivity (under 5 Oe) and high initial permeability (about 1000) were obtained together with zero magnetostriction for Fe-Al-Ti ternary films by adding a small amount of Ti. In the case of Fe-Co-Ti ternary films, low coercivity and high permeability were obtained along with small grain sizes of 10 nm or so. Films with low magnetostriction (λ
s
≪3×10
-6
) had a coercivity roughly proportional to the third power of the grain diameter.
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