{"title":"IBS方法制备的超硅铁多层薄膜的软磁性能","authors":"H. Koumura;K. Niizuma;Y. Utsushikawa","doi":"10.1109/TJMJ.1994.4565989","DOIUrl":null,"url":null,"abstract":"The magnetic alloy Super Sendust (SS(I)) has a high saturation magnetization and high permeability. This paper reports on the magnetic properties of SS(I)/Fe multilayer thin films prepared by the ion beam shuttering method. As-deposited SS(I)(130Å)/Fe(130Å) multilayer thin films have a saturation magnetization of 1350 emu/cc, a coercive force of 2.2 Oe, and an effective permeability of 700. Multilayer thin film annealed at 350°C in vacuum for one hour exhibits a low coercive force of 0.5 Oe and a high effective permeability of 1250. Based on experimental results in which the soft magnetic properties were improved by heat treatment, it seems that internal stress relaxation is caused by a decrease in the interplanar spacing.","PeriodicalId":100647,"journal":{"name":"IEEE Translation Journal on Magnetics in Japan","volume":"9 6","pages":"255-260"},"PeriodicalIF":0.0000,"publicationDate":"1994-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1109/TJMJ.1994.4565989","citationCount":"1","resultStr":"{\"title\":\"Soft Magnetic Properties of Super Sendust/Fe Multilayer Thin Films Prepared by the IBS Method\",\"authors\":\"H. Koumura;K. Niizuma;Y. Utsushikawa\",\"doi\":\"10.1109/TJMJ.1994.4565989\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The magnetic alloy Super Sendust (SS(I)) has a high saturation magnetization and high permeability. This paper reports on the magnetic properties of SS(I)/Fe multilayer thin films prepared by the ion beam shuttering method. As-deposited SS(I)(130Å)/Fe(130Å) multilayer thin films have a saturation magnetization of 1350 emu/cc, a coercive force of 2.2 Oe, and an effective permeability of 700. Multilayer thin film annealed at 350°C in vacuum for one hour exhibits a low coercive force of 0.5 Oe and a high effective permeability of 1250. Based on experimental results in which the soft magnetic properties were improved by heat treatment, it seems that internal stress relaxation is caused by a decrease in the interplanar spacing.\",\"PeriodicalId\":100647,\"journal\":{\"name\":\"IEEE Translation Journal on Magnetics in Japan\",\"volume\":\"9 6\",\"pages\":\"255-260\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1109/TJMJ.1994.4565989\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Translation Journal on Magnetics in Japan\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/4565989/\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Translation Journal on Magnetics in Japan","FirstCategoryId":"1085","ListUrlMain":"https://ieeexplore.ieee.org/document/4565989/","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Soft Magnetic Properties of Super Sendust/Fe Multilayer Thin Films Prepared by the IBS Method
The magnetic alloy Super Sendust (SS(I)) has a high saturation magnetization and high permeability. This paper reports on the magnetic properties of SS(I)/Fe multilayer thin films prepared by the ion beam shuttering method. As-deposited SS(I)(130Å)/Fe(130Å) multilayer thin films have a saturation magnetization of 1350 emu/cc, a coercive force of 2.2 Oe, and an effective permeability of 700. Multilayer thin film annealed at 350°C in vacuum for one hour exhibits a low coercive force of 0.5 Oe and a high effective permeability of 1250. Based on experimental results in which the soft magnetic properties were improved by heat treatment, it seems that internal stress relaxation is caused by a decrease in the interplanar spacing.
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