Co-Fe-Ta-N薄膜的软磁特性和各向异性

T. Shimatsu;W. Kimura;M. Takahashi;T. Wakiyama
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摘要

本文讨论了Co-(0-6at%)Fe-(7-10at%)Ta-N纳米晶薄膜的软磁性能与微观磁结构之间的关系。增加Fe含量可以通过减少局部各向异性波动来改善薄膜的软磁性能。矫顽力的温度依赖性表明,由于Fe含量的增加,室温下磁晶各向异性的降低在降低局部各向异性波动方面起着重要作用。此外,随着Fe含量的增加,薄膜的磁致伸缩减小,这表明线性磁致伸缩的幅度减小。另一方面,在所有膜中,通过磁退火可逆地诱导单轴磁各向异性能量Ku。随着Fe含量从0增加到6at%,Ku的大小逐渐升高,并且含有6at%Fe的膜的Ku大约是不含有Fe的膜Ku的两倍大。
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Soft Magnetic Properties and Anisotropy of Co-Fe-Ta-N Films
This paper discusses the correlation between soft magnetic properties and microscopic magnetic structure in Co-(0-6 at%) Fe-(7-10 at%) Ta-N nanocrystalline films. Increasing the Fe content improves the soft magnetic properties of the films by decreasing the local anisotropy fluctuation. The temperature dependence of the coercive force indicates that the decrease in the magnetocrystalline anisotropy at room temperature due to the increase in Fe content plays an important role in decreasing the local anisotropy fluctuation. Furthermore, with increasing Fe content the film magnetostriction decreases, which suggests that the magnitude of the linear magnetostriction decreases. On the other hand, the uniaxial magnetic anisotropy energy K u is reversibly induced by magnetic annealing in all films. As the Fe content is increased from 0 to 6 at% the magnitude of K u gradually rises, and the K u of films containing 6 at% Fe is about twice as large as that of films not containing Fe.
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