基于电荷等离子体的无掺杂纳米线场效应晶体管性能分析

Q3 Physics and Astronomy Journal of Nano-and electronic Physics Pub Date : 2023-01-01 DOI:10.21272/jnep.15(3).03031
P. Raja, P. Chander, B. Faisal, V. Prakash
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引用次数: 0

摘要

提出的工作重点是将电荷等离子体(CP)概念包含在10纳米以下的圆柱形纳米线场效应晶体管(NWFET)中所带来的结果。栅极被氧化层包围,氧化层进一步被沟道层包围。电荷等离子体的概念是通过在通道周围环绕氧化层而引入的,并且在氧化物周围有一个不同的功函数金属层。描述了电势和传递特性等器件参数的性能。在35 nm和10 nm的通道长度下,对阈值电压、漏极电流和I ON / I OFF比进行了分析。利用Sentaurus Technology计算机辅助设计(TCAD)对该器件进行了10nm以下的评价和分析。为了计算隧道和复合,TCAD模拟了Lombardi迁移率模型、Shockley-Read-Hall (SRH)模型、密度梯度模型和Auger复合模型。与传统NWFET相比,该器件通过使用基于cp的NWFET产生两倍以上的输出电流。寄生泄漏减少,I - ON /I - OFF比稳定。此外,可扩展性也得到了增强,肖特基结的高垂直场降低了源极和漏极场线之间的横向耦合。这可以用来实现在存储器器件,如逆变器,6T SRAM
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Performance Analysis of Charge-plasma Based Doping less Nanowire Field Effect Transistor
The proposed work focuses on the outcomes brought about by the inclusion of Charge Plasma (CP) concept in a cylindrical Nanowire Field Effect Transistor (NWFET) for sub 10 nm. The Gate is surrounded by an oxide layer, which is further surrounded by a channel layer. The concept of charge-plasma is introduced in the channel by surrounding an oxide layer around the channel, and a different work functions metal layer around the oxide. The performance of device parameters like the electric potential and transfer characteristics have been described. Analysis of Threshold Voltage, drain current and I ON / I OFF ratio have been carried for 35 nm and 10 nm channel length. Sentaurus Technology Computer Aided Design (TCAD) has been used to evaluate and analyze this device for sub 10 nm. To calculate tunneling and recombination, the TCAD simulates the Lombardi mobility model, Shockley-Read-Hall (SRH), Density Gradient model, and Auger recombination models. This device generates twice times more output current by using the CP-based NWFET as compared to the conventional NWFET. The parasitic leakage has been reduced and the I ON /I OFF ratio has been stabilized. Also, the scalability is enhanced, and the Schottky junction's high vertical field lowers the lateral coupling between the source and drain field lines. This can be used to implement in memory devices such as Inverter, 6T SRAM
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来源期刊
Journal of Nano-and electronic Physics
Journal of Nano-and electronic Physics Materials Science-Materials Science (all)
CiteScore
1.40
自引率
0.00%
发文量
69
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