透射偏转法和希尔伯特变换三维测量的研究

Silin Na, Younghun Yu
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引用次数: 0

摘要

我们使用透射偏转法测量光学元件的三维形状,并使用希尔伯特变换从测量的变形条纹图像中检索相位。偏转法适用于测量大型样品和镜面样品。从形变条纹图像和hilbert变换图像中提取相位,并利用最小二乘法求出高度信息。通过计算机仿真和实验验证了利用希尔伯特变换进行相位恢复的有效性。关键词:偏转法,相位测量偏转法,希尔伯特变换;代码:(120.0120)仪器,测量,计量;(120.2650)条纹分析;(120.3940)计量
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A Study of Three-Dimensional Measurement By Transmission Deflectometry and Hilbert Transform
We used transmission deflectometry to measure the three-dimensional shapes of optical components, and we used the Hilbert transform to retrieve the phases from measured deformed fringe images. Deflectometry is useful for measuring large-scale samples, and specular samples. We have retrieved the phases from deformed fringe images and Hilbert-transformed images, and have used the least-squares method to find the height information. We have verified that phase retrieval using Hilbert transform is useful by computer simulation and experiment.Keywords: Deflrctometry, Phase measuring deflectometry, Hilbert transformOCIS codes: (120.0120) Instrumentation, measurement, and metrology; (120.2650) Fringe analysis; (120.3940) Metrology
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