利用计算机生成全息图测量长焦距非球面透镜波前功率谱密度

Xiaohong Wei, Kaiyuan Xu, Ang Liu
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引用次数: 0

摘要

为了保证光学系统的性能,对长焦距镜头的加工精度提出了要求,以保证成像质量。提出了一种利用二相计算机生成全息图(CGH)测量中频域透镜透射波前功率谱密度的新方法。该技术应用广泛,尤其适用于测量长焦距的大尺寸镜头。通过与菲索球干涉法测量结果的对比实验,验证了测量的准确性和方便性。分析了CGH制造过程中测量不确定度的影响。CGH测试分析表明,对于焦距大于30 m,净光圈为Φ410 mm的球面透镜,总体精度RMS小于1 nm。CGH可以提供高精度的参考球,同时大大缩短了空气空间,从而减少了振动和空气湍流的影响,因此对于透镜透射波前PSD测量具有重要意义。长焦透镜波前PSD高精度、高效率无损检测的实现,保证了加工的超精度和确定性水平,从而提高了光学系统的综合性能。
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The Wavefront Power Spectral Density Measurement of Aspheric Lens with Long Focal-Length Using a Computer-Generated Hologram
To ensure the performance of the optical system, the machining accuracy of lens with long focal lengths is required to ensure the image quality. A new method for lens transmission wavefront power spectral density (PSD) in mid-frequency domain measurement using binary phase computer-generated hologram (CGH) is presented. This technique is widely applicable and is par-ticularly useful for measuring large-size lenses with long focal lengths. A comparison experiment of the CGH measurement with results from a Fizeau sphere interferometry method is carried out to verify the accuracy and con-venience of the measurement. Furthermore, measurement uncertainty due to CGH fabrication process is analysed. Analysis of the CGH test showed the overall accuracy of less than 1 nm RMS for a sphere lens with over 30 m focal length and Φ410 mm clear aperture. CGH can provide reference spheres with high precision, in the meantime greatly shorten air space, thus reducing the effect of vibration and air turbulence, therefore is of great importance for lens transmission wavefront PSD measurement. The realization of high precision, high efficiency and nondestructive testing of long focal-lens wavefront PSD ensure the ultra-precision and certainty level of machining, hence improving the comprehensive performance of the optical system.
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