单电机驱动广义椭偏仪变角度机构的设计与实现

Q4 Physics and Astronomy 光学应用 Pub Date : 2023-01-01 DOI:10.5768/jao202344.0301006
Liu Zhengjie, Xue Peng, Chen Yuanyuan, Liu Yanlin, Xie Dayang, Zhang Rui
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Design and implementation of variable angle mechanism of generalized ellipsometer driven by single motor
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来源期刊
光学应用
光学应用 Physics and Astronomy-Atomic and Molecular Physics, and Optics
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1.00
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0.00%
发文量
5894
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