用于光子应用的PIN光电二极管的仿真与特性

W. Ahmad, Muhammad Umair Ali, V. Laxmi, A. Syed
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引用次数: 10

摘要

近年来,对硅基光电探测器技术的研究显示出发展强大的硅基光子探测器的势头。研制低成本、高效率、兼容CMOS工艺的探测器是当前研究的重点。在这项研究中,设想了一种新的PIN光电二极管的设计和表征。仿真工具Silvaco TCAD(及其变体)用于设计和模拟设备的过程。分析了电学和光学测量,如I-V特性(暗电流)和内外量子效率,以评估设计和加工的器件结构在光子学和其他检测机制中的潜在应用。
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Simulation and Characterization of PIN Photodiode for Photonic Applications
Research conducted on silicon based photodetector technology has recently shown rapidly growing momentum to develop the robust silicon based detectors for photonic applications. The thrust is to manufacture low cost and high efficiency detectors with CMOS process compatibility. In this study, a new design and characterization of PIN photodiode is envisaged. The simulation tool, Silvaco TCAD (and its variants), was used to design and simulate the processes of the device. Electrical and optical measurements such as I-V characteristics (dark current), and internal/external quantum efficiencies were analysed to evaluate the designed and processed device structure for its potential applications in photonics and other detection mechanisms.
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